半导体光电, 2018, 39 (2): 197, 网络出版: 2018-05-29
一种微型光纤光栅压力传感器
A Design of Miniature Fiber Bragg Grating Pressure Sensor
光纤布拉格光栅 压力传感器 工形膜片 有限元模拟仿真 fiber Bragg grating pressure transducer quarter-flipped-H shape chip finite-element simulation
摘要
设计并实现了一种新型光纤光栅压力传感器。该传感器以光纤布拉格光栅(FBG)为敏感元件, 通过菱形钢结构, 将压力转换为膜片横向应变, 通过将光纤光栅粘于工形膜片中心轴线上, 可将压力转换为光纤光栅轴向应变, 通过解调光栅的中心波长漂移即可得到压力大小。传感器外壳采用圆柱体刚性封装, 外高为13mm, 直径为33mm。对设计的传感器进行了压力标定测试, 得出传感器的线性拟合度为0.9935, 量程为0~0.234MPa, 灵敏度为3.341nm/MPa。
Abstract
A new type of micro-fiber Bragg grating pressure sensor was proposed and realized in this paper. Applying fiber Bragg grating (FBG) as the sensitive component, the pressure was converted to the diaphragm transverse strain through the steel diamond structure. By attaching the fiber grating to the center axis of the diaphragm, the pressure can be converted to the axial strain of the fiber grating, thus the pressure can be obtained by demodulating the center wavelength drift of the grating. The sensor shell is rigid encapsulated by a cylinder with a height of 13mm and a cylindrical diameter of 33mm. Through the pressure calibration test of the sensor, the linear fitting degree of the sensor is 0.9935, the range is 0~0.234MPa, and the sensitivity is 3.341nm/MPa.
马彦华, 刘倩, 刘仪琳, 徐琳, 李丽君. 一种微型光纤光栅压力传感器[J]. 半导体光电, 2018, 39(2): 197. MA Yanhua, LIU Qian, LIU Yilin, XU Lin, LI Lijun. A Design of Miniature Fiber Bragg Grating Pressure Sensor[J]. Semiconductor Optoelectronics, 2018, 39(2): 197.