量子电子学报, 2018, 35 (3): 300, 网络出版: 2018-06-09  

用于FBG刻写的小型准分子激光器实验研究

Experiment research of compact excimer laser for writing FBG
作者单位
中国科学院安徽光学精密机械研究所,安徽省光子器件与材料重点实验室, 安徽 合肥 230031
摘要
248 nm的KrF准分子激光是光纤布拉格光栅(FBG)的首选刻蚀光源。针对FBG的刻写要 求,研制了一台小型化KrF准分子激光器,并进行了机械结构设计和改进。实验研究了充电电压、 放电电容、工作气体配比和储气腔内的气体压力对输出激光能量和效率的影响,优化了激光器性 能,输出的重复频率达200 Hz,单脉冲输出能量达16 mJ,能量不稳定度小于2%,输出窗口附近的 近场光斑尺寸为6 mm×3 mm,最高输出效率为1.24%。用该激光器作为光源采用相位掩模法进行了FBG刻写的 实验,效果良好。
Abstract
248 nm KrF excimer laser is the preferred choice for writing fiber Bragg grating (FBG). A miniaturized KrF excimer laser is developed according to the requirements of FBG writing, and the mechanical structure design and improvement are also carried out. The output laser energy and efficiency dependent on the charging voltage, discharge capacitance, components of mixed gas and gas pressure in storage cavity are investigated experimentally. The laser’s performance is optimized. The output repetition rate reaches 200 Hz, and the single-pulse output energy is up to 16 mJ. The energy instability is less than 2%, and the near-field spot dimensions are 6 mm×3 mm near the output window. The maximal output efficiency is 1.24%. The experiment to write FBG by using phase-mask method is carried out using the laser with good results.

张威, 方晓东, 梁勖. 用于FBG刻写的小型准分子激光器实验研究[J]. 量子电子学报, 2018, 35(3): 300. ZHANG Wei, FANG Xiaodong, LIANG Xu. Experiment research of compact excimer laser for writing FBG[J]. Chinese Journal of Quantum Electronics, 2018, 35(3): 300.

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