在以激光作为测试光源的高精度测试装置中,激光器实际输出的束形参数值与其标称值的偏离会直接传递并影响到后续测试结果的准确度。提出一种基于CCD的多点测试方法,此方法在不降低测量精度的条件下可实现激光束形参数的简便测试。在搭建的测试装置上实现了633 nm HeNe激光器束腰半径、远场发散角和M2质量因子的测量,可以方便地评价激光光束质量。将束形参数简便测试方法的结果与法国Phasics公司的SID4波前探测器的测量结果进行了比对,结果表明,激光束形参数简便测试方法不仅能用于激光束形参数的简便检测,而且具有较高的精度。

In the high-precision test equipment with laser as the test light source,the deviation of the actual output beam parameter value from its nominal value directly affects the accuracy of subsequent test results.This paper presents a multi-point test method based on CCD which can achieve the convenient test of laser beam parameters without reducing the measurement accuracy.The measurement of beam waist radius,far field divergence angle and M2 factor of 633 nm He-Ne laser is realized with the test set,and the laser beam quality can be conveniently evaluated.In order to verify the accuracy of this test method,the results of convenient test method were compared with the results of the SID4 wavefront detector of Phasics.The results show that the proposed method can not only be used for the convenient detection of laser beam parameters,but also has high precision.