红外与激光工程, 2018, 47 (9): 0906007, 网络出版: 2018-10-06  

一种应用于激光微烧蚀的光学聚焦系统简化设计方法

Simplified optical focusing design method applied to laser micro ablation
作者单位
航天工程大学 宇航科学与技术系 激光推进及其应用国家重点实验室, 北京 101416
摘要
针对激光微推力器对光学聚焦系统结构紧凑、聚焦光斑尺寸小以及避免羽流污染的特殊要求, 采用传统的光线追迹法研究单透镜直接聚焦、双透镜准直聚焦两种典型方案光学设计方法。针对低功耗半导体激光器光纤耦合输出的芯径和数值孔径条件, 在50 ?滋m级聚焦光斑约束下, 研究单透镜聚焦系统设计方案, 得到了透镜厚度、焦距、工作距等设计参数的关系; 研究准直聚焦光学系统的双透镜系统设计方案, 得到了透镜厚度、透镜中心距、工作距等设计参数特征关系。针对两种典型光学设计方案, 给出了工程应用设计参数。文中提出的设计方法避免了复杂的光学设计过程, 可为激光微推力器激光光束微尺度聚焦提供一种简单实效的方法。
Abstract
Considering the optical focusing system in need of compact structure, the small focus spot size and avoiding the plume pollution in laser ablation micro thruster, the traditional ray tracing method was used to study the two typical optical design methods of single lens direct focusing and double lens for collimation and focusing. In the condition of fiber core diameter and numerical aperture for the low power semiconductor laser output and the design requirement of 50 micron focus light spot, the relationship between the design parameters of the lens thickness, the focal length and the working distance was obtained for the single lens focusing system. On the other hand, the relationship between design parameters such as lens thickness, lens center distance and working distance were also discussed, in the light of the design scheme of the double lens system for collimated focusing optical system. According to two typical schemes, the engineering application design parameters were given. The design method proposed in this paper avoids the complicated optical design process and provides a simple and practical method for the laser beam microscale focusing.

常浩, 叶继飞, 李南雷, 周伟静. 一种应用于激光微烧蚀的光学聚焦系统简化设计方法[J]. 红外与激光工程, 2018, 47(9): 0906007. Chang Hao, Ye Jifei, Li Nanlei, Zhou Weijing. Simplified optical focusing design method applied to laser micro ablation[J]. Infrared and Laser Engineering, 2018, 47(9): 0906007.

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