中国激光, 2018, 45 (11): 1104005, 网络出版: 2018-11-15
自由曲面干涉仪中自适应零位补偿器间距标定 下载: 765次
Spacing Calibration of Adaptive Null Compensator in Free Form Surface Interferometer
测量 自由曲面检测 自适应干涉仪 自适应零位补偿器 间距标定 measurement free form surface measurement adaptive interferometer adaptive null compensator spacing calibration
摘要
研究了自适应补偿器(ANC)中两大补偿器——可变形镜(DM)和部分补偿镜之间的轴向距离标定技术,提出了一种多零位约束方法,利用一块校准镜,通过DM形变实现不同位置的零位检测,从而构建多个测量方程用以限制误差耦合,实现ANC空间间距自标定。通过仿真和实验验证了该标定方法的高精度。该方法摒弃了外部直接测量手段,使得ANC和整体干涉仪的集成化成为可能。
Abstract
The axial spacing calibration between the two big compensators, the deformable mirror (DM) and the partial null optics in the adaptive null compensator (ANC), is investigated. A multi-null constraint method is proposed, in which the deformation of the DM is used to acquire the null measurements at different positions with the help of a calibrating mirror. Thus the multiple measurement equations are constructed to constrain the error coupling and the self-calibration of spacing distance in ANC is realized. The high efficiency of this method is verified by simulations and experiments. The direct measurement way is discarded in this method, which makes the integration between ANC and the whole interferometer possible.
张磊, 李东, 周胜, 李劲松, 俞本立. 自由曲面干涉仪中自适应零位补偿器间距标定[J]. 中国激光, 2018, 45(11): 1104005. Zhang Lei, Li Dong, Zhou Sheng, Li Jingsong, Yu Benli. Spacing Calibration of Adaptive Null Compensator in Free Form Surface Interferometer[J]. Chinese Journal of Lasers, 2018, 45(11): 1104005.