液晶平板显示器(Liquid Crystal Display,LCD)特别是TFT-LCD性能优良,大规模生产特性好,自动化程度高,原材料成本低廉,发展空间广阔。切割工序在LCD加工流程中占有举足轻重的地位。切割的主要作用是对大基板产品进行加工,根据设计的单元尺寸,将大基板分割成小单元。加工过程中参数及作业手法的控制对LCD的强度和功能有重要影响。随着LCD设备朝大尺寸、超薄化、像素致密化方向发展,对产品可靠性的要求越来越高,如何减小切割工序对LCD良率及可靠性的影响是本文研究的重点。

Flat panel Liquid Crystal Displays (LCDs), especially TFT-LCDs have excellent performance, good mass production characteristics, high degree of automation, low cost of raw materials and broad development space. The cutting step plays a pivotal role in the fabrication process of LCDs. The main function of cutting is to process large substrate products. According to the designed cell size, a large substrate is divided into several small cells. The control of the parameters and operation skills in processing has important impact on the strength and function of LCDs. With the development of LCD equipment towards large size, ultra-thin and pixel densification, the requirements of product reliability are becoming higher and higher. How to reduce the impact of cutting on LCD yield and reliability is the focus of this paper.