为了实现非接触式、快速高精度的光学检测,设计了一种共聚焦激光扫描显微光学系统。在保证设计指标的前提下,简化了各光组的结构,采用7片球面透镜并以K9玻璃作为透镜材料。使用Zemax软件对光学系统进行了设计和仿真。结果表明:物镜的数值孔径为0.49;系统的径向和轴向光学分辨率分别为0.400 μm和0.772 μm;显微聚焦系统聚焦弥散斑直径小于2 μm;照明系统聚焦弥散斑直径小于10 μm;探测系统的聚焦光斑直径小于20 μm;根据仿真结果确定了针孔1和针孔2的尺寸均为20 μm,且厚度不超过0.1 mm;各子系统的MTF曲线均接近衍射极限,具有很高的光学传输效率。

For realization of non-contact,fast and high precision optical detecting,a confocal laser scanning microscope system was designed.To ensure the design requirements,while simplifying the structure of each optical group,the system has 7 single spherical lens with the K9 glass as the lens material.The Zemax software was used in the design and simulation.The simulation results show that the numerical aperture of the microscope objective is 0.49.The radial and axial optical resolutions of the system are 0.400 μm and 0.772 μm respectively.The focal spot size of microscope objective and focusing system is less than 2 μm.The focal spot size of lighting system is less than 10 μm.The focal spot size of detection system is less than 20 μm.According to the simulation results,the sizes of pinhole 1 and pinhole 2 are all 20 μm,and the thickness does not exceed 0.1 mm.The MTF curves of each subsystem are close to the diffraction limit,which means the systems have high optical transmission efficiency.