中国激光, 2019, 46 (1): 0111001, 网络出版: 2019-01-27
脉冲激光诱导碳等离子体的特性 下载: 878次
Characteristics of Carbon Plasma Induced by Pulsed Laser
激光技术 等离子体诊断 碳等离子体 发射光谱法 电子温度 laser technique plasma diagnosis carbon plasma optical emission spectroscopy electron temperature
摘要
为了研究不同空气压力条件下碳等离子体的动力学特性, 采用发射光谱法对碳等离子体进行诊断。采用1064 nm Nd∶YAG激光器烧蚀碳靶, 测得早期的发射光谱为连续谱, 此时使用黑体辐射公式拟合并推算碳等离子体的电子温度; 当线状谱出现后, 采用玻尔兹曼作图法计算电子温度, 并观察电子温度和电子密度随延时的演化趋势, 以及空气压力对演化的影响。结果表明:不同空气压力条件下, 电子温度和电子密度随延时的变化趋势一致; 随着空气压力增大, 等离子体受到的限制更大, 粒子间的碰撞增加, 导致电子温度和电子密度随之增大; 在0.01 Pa压力下沉积得到了石墨烯薄膜。
Abstract
In order to study the kinetics of carbon plasma under different air pressure conditions, the carbon plasma is diagnosed by optical emission spectroscopy. The carbon target is ablated with a 1064 nm Nd∶YAG laser. The early emission spectrum is continuous spectrum, and the electron temperature of the carbon plasma is estimated by using the black body radiation formula. When the line spectrum appears, the electron temperature is calculated by Boltzmann mapping method, and the evolutions of electron temperature and density with time and the influence of different pressures on the evolutions are observed. The results show that the changes of the temperature and density of electrons are consistent with time under different air pressure conditions. And as the gas pressure increases, the plasma is limited. As the collision between particles increases, the electron temperature and electron density increase. Graphene films are deposited at pressure of 0.01 Pa.
周素素, 王新兵, 左都罗. 脉冲激光诱导碳等离子体的特性[J]. 中国激光, 2019, 46(1): 0111001. Zhou Susu, Wang Xinbing, Zuo Duoluo. Characteristics of Carbon Plasma Induced by Pulsed Laser[J]. Chinese Journal of Lasers, 2019, 46(1): 0111001.