应用激光, 2018, 38 (6): 968, 网络出版: 2019-01-27  

铬粘附层对金/二氧化硅界面热导影响研究

Influence of Chromium Adhesion Layer on Thermal Boundary Conductance of Au/SiO2 Interface
戴超伦 1,*刘亚 1赵旸 1,2
作者单位
1 中国科学技术大学工程科学学院,安徽 合肥 230000
2 中国科学院材料力学行为和设计重点实验室,安徽 合肥 230000
摘要
随着微电子技术的发展,金/二氧化硅薄膜结构作为微电子器件中常见的结构,其较低的界面热导数值对器件散热造成困难,提高金/二氧化硅界面热导并对该界面热导进行准确测量变得越来越重要。采用基于时域热反射法搭建的双光束飞秒激光瞬态热反射测量系统对不同厚度铬粘附层的金/二氧化硅界面热导进行测量。铬粘附层厚度范围为0~4 nm,通过控制磁控溅射镀铬粘附层的时间来控制厚度。测量结果表明铬粘附层的存在对金/二氧化硅界面热导提升有重要作用,随着铬粘附层厚度增大,金/二氧化硅间的界面热导数值有微弱的增大趋势,基本不变。铬粘附层使金与二氧化硅之间的结合由物理粘附转化为化学粘附,增大界面之间的结合力,从而起到增大界面热导的作用。利用纳米划痕实验法比较了不同铬粘附层厚度的金/二氧化硅间的界面结合力,其结果与界面热导数值具有相同的趋势。
Abstract
With the development of microelectronics technology, Au/SiO2 film structure is a common structure in microelectronic devices, its lower thermal boundary conductance value makes it difficult to dissipate heat of the device, improve the Au/SiO2 thermal boundary conductance and accurate measurement of thermal boundary conductance is becoming increasingly important. A double-beam femtosecond laser transient thermal reflection measurement system based on time-domain thermoreflectance technique is used to measure the thermal boundary conductance of the Au/SiO2 interface with different thicknesses of Cr adhesion layers. The thickness of the Cr adhesion layer varies from 0 to 4 nm, and the thickness is controlled by controlling the time of magnetron sputtering of the chrome-plated adhesion layer. The results show that the Cr adhesion layer could significantly enhance the thermal boundary conductance of Au/SiO2 interface, and with the increase of the thickness of the Cr adhesion layer, the thermal boundary conductance of Au/SiO2 interface has a slight increase trend, basically unchanged. The Cr adhesion layer converts the bond between Au and SiO2 from physical adhesion to chemical adhesion, increasing the bonding force between the interfaces, thereby increasing the thermal boundary conductance. The bonding strength at interface are also characterized with nanoscratch test method. The results have the same trend as the thermal boundary conductance values.

戴超伦, 刘亚, 赵旸. 铬粘附层对金/二氧化硅界面热导影响研究[J]. 应用激光, 2018, 38(6): 968. Dai Chaolun, Liu Ya, Zhao Yang. Influence of Chromium Adhesion Layer on Thermal Boundary Conductance of Au/SiO2 Interface[J]. APPLIED LASER, 2018, 38(6): 968.

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