半导体光电, 2019, 40 (1): 48, 网络出版: 2019-03-25  

基于视觉反馈的芯片高精定位系统标定算法研究

Research on Calibration Algorithm for High Precision Chip Positioning System Based on Visual Feedback
作者单位
华中科技大学 机械科学与工程学院, 武汉 430073
摘要
在LED芯片的制造过程中, 检测和分拣都需要对芯片进行定位, 定位的精度和速度也直接影响了LED芯片的生产质量和效率。为满足LED芯片定位系统的精度要求, 提出了一种改进的标定算法。首先分析误差来源, 确定主要误差来源于安装角度偏差, 然后通过误差分析结果提出了改进的标定算法来补偿安装误差, 相较于传统标定算法的矩阵求解, 线性运算降低了标定时间。实验结果表明, 改进的标定算法能有效提高芯片的定位精度, 同时有较高的鲁棒性。
Abstract
In the process of LED chip manufacturing, the chip needs to be positioned in the detection and sorting process, and the positioning accuracy and speed directly determine the chips quality and efficiency. In order to meet the high precision of the chip positioning system, an improved calibration algorithm is proposed. Firstly, by analyzing the sources of error, the main source from the installation angle deviation was confirmed. Then, according to the result of error analysis, an improved calibration algorithm was proposed to compensate the installation error. Compared to traditional calibration algorithms for solving matrix, the real-time performance is improved by linear operation. Finally, experimental results show that the proposed algorithm can availably improve the chip positioning accuracy, and presents good robustness at the same time.

龚时华, 周迪一, 王子悦, 李德龙. 基于视觉反馈的芯片高精定位系统标定算法研究[J]. 半导体光电, 2019, 40(1): 48. GONG Shihua, ZHOU Diyi, WANG Ziyue, LI Delong. Research on Calibration Algorithm for High Precision Chip Positioning System Based on Visual Feedback[J]. Semiconductor Optoelectronics, 2019, 40(1): 48.

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