采用时域有限差分法,对均匀蛾眼结构(UMS)和双混合蛾眼结构(BHMS)进行仿真,分析底面直径和高度对反射率的影响规律,比较了UMS与BHMS的减反射性能。基于反射率曲线和电场强度分布,分析了BHMS优异的减反射性能。结果表明:在300~1200 nm波段,UMS的反射率随着高度的增大而减小,随着底面直径的增大而先减小后增大;当底部直径为250 nm时,由不同高度的UMS组成的BHMS的平均反射率大于相应UMS的最小平均反射率;由不同底面直径UMS组成的BHMS的减反射性能可以进一步提升。

The finite-difference time-domain method is used to simulate uniform moth-eye structure (UMS) and bi-hybrid moth-eye structure (BHMS). The influences of height and bottom diameter on the reflectance are analyzed, and the anti-reflection properties of UMS and BHMS are compared. The superior anti-reflection property of BHMS is analyzed based on the reflectance curves and the electric field intensity distribution. The results show that the reflectance of UMS decreases with the increase of height, and decreases and then increases with the increase of bottom diameter in the wavelength range of 300-1200 nm. The average reflectance of BHMS consisting of UMS with different heights is greater than the minimum average reflectance of the corresponding UMS when the bottom diameter is 250 nm. The anti-reflection property of BHMS consisting of UMS with different bottom diameters can be further improved.