首页 > 论文 > 中国激光 > 46卷 > 4期(pp:404005--1)

基于自准直仪的测角传感器实时在位校准方法

Real-Time In-Situ Calibration for Angle Measuring Sensor Based on Autocollimator

  • 摘要
  • 论文信息
  • 参考文献
  • 被引情况
  • PDF全文
分享:

摘要

提出了一种基于自准直仪的在位校准方法。基于圆周封闭原则和傅里叶级数的性质, 建立了测量值与理想值之间的函数关系, 利用理想刻线位置和实际刻线位置的偏差, 获得了校准曲线, 详细推导和分析了校准原理, 搭建了校准测角系统, 并进行了实验验证。实验结果表明, 单读数头测角传感器原始测角误差为734.8″, 校准后误差为2.4″, 且校准效果优于常用的谐波补偿方法, 校准系统的重复性优于0.13″。在位校准方法能够有效减小测角误差, 且方法简单, 校准效率高。

Abstract

An in-situ calibration method based on the autocollimator is proposed. Based on the principle of circumferential closure and the nature of Fourier series, this paper establishes the functional relationship between the measured value and the ideal value. Using the deviation between the ideal scribing position and the actual scribing position, we obtain the calibration curves. The calibration principle is deduced and analyzed in detail. The calibration angle measurement system is built and verified by experiments. The experimental results show that the original angle measurement error of the single readhead angle measurement sensor is 734.8″, and the error after calibration is 2.4″, and the calibration effect is better than that of the commonly used harmonic compensation method. The repeatability of the calibration system is better than 0.13″. The in-situ calibration method can effectively reduce the angle measurement error, and the method is simple and the calibration efficiency is high.

Newport宣传-MKS新实验室计划
补充资料

中图分类号:P204

DOI:10.3788/cjl201946.0404005

所属栏目:测量与计量

基金项目:2018年度博士科研启动经费项目(BSKJ201827)

收稿日期:2018-11-20

修改稿日期:2018-12-10

网络出版日期:2018-12-29

作者单位    点击查看

张文颖:吉林工程技术师范学院量子信息技术交叉学科研究院, 吉林 长春 130052吉林省量子信息技术工程实验室, 吉林 长春 130052
朱浩然:长春理工大学电子信息工程学院, 吉林 长春 130022
李美萱:吉林工程技术师范学院量子信息技术交叉学科研究院, 吉林 长春 130052吉林省量子信息技术工程实验室, 吉林 长春 130052
郭泽萱:吉林工程技术师范学院量子信息技术交叉学科研究院, 吉林 长春 130052吉林省量子信息技术工程实验室, 吉林 长春 130052
郭明:吉林工程技术师范学院量子信息技术交叉学科研究院, 吉林 长春 130052吉林省量子信息技术工程实验室, 吉林 长春 130052

联系人作者:朱浩然(zwyzwy8866@163.com)

【1】Wu Y L, Wan H J. A calibration algorithm of angle measuring error based on coordinate transformation[J]. Electronic Science and Technology, 2016, 29(9): 45-47, 51.
吴一龙, 万红进. 一种基于坐标变换的测角误差校正算法[J]. 电子科技, 2016, 29(9): 45-47, 51.

【2】Zhang L, Xiang Y. Correction algorithm of systemic errors in grating lateral-shearing interferometer[J]. Chinese Journal of Lasers, 2018, 45(8): 0804008.
张璐, 向阳. 光栅横向剪切干涉仪系统误差的校正方法[J]. 中国激光, 2018, 45(8): 0804008.

【3】Geckeler R D, Just A. A shearing-based method for the simultaneous calibration of angle measuring devices[J]. Measurement Science and Technology, 2014, 25(10): 105009.

【4】Probst R. Self-calibration of divided circles on the basis of a prime factor algorithm[J]. Measurement Science and Technology, 2008, 19(1): 015101.

【5】Palmer E W. Goniometer with continuously rotating gratings for use as an angle standard[J]. Precision Engineer. 1988, 10(3): 147-152

【6】Masuda T, Kajitani M. An automatic calibration system for angular encoders[J]. Precision Engineering, 1989, 11(2): 95-100.

【7】Zhang J J, Zhang Z Y, Liu J C. Novel method of calibrating the angle-measurement error of resolver[J]. Chinese Journal of Scientific Instrument, 2010, 31(1): 149-153.
张京娟, 张仲毅, 刘俊成. 一种新型的旋转变压器测角误差标定技术[J]. 仪器仪表学报, 2010, 31(1): 149-153.

【8】Huang Y, Xue Z, He Y W. Comparison between angle interferometer and angle encoder during calibration of autocollimator[J]. Proceedings of SPIE, 2015, 9446: 944624.

【9】Zhai Z S, Cheng Z, Zhang Y H, et al. Optical analysis of Moiré fringes of concentric-circle gratings[J]. Laser & Optoelectronics Progress, 2018, 55(7): 070501.
翟中生, 程壮, 张艳红, 等. 同心圆光栅莫尔条纹的光学分析[J]. 激光与光电子学进展, 2018, 55(7): 070501.

【10】Liu S. Installation and alignment of circular grating encoder[J]. Equipment for Electronic Products Manufacturing, 2018, 47(4): 46-48.
刘帅. 圆光栅编码器安装与对准[J]. 电子工业专用设备, 2018, 47(4): 46-48.

【11】Ai C G, Chu M, Sun H X, et al. Eccentric testing of benchmark circular grating and compensation of angular error[J]. Optics and Precision Engineering, 2012, 20(11): 2479-2484.
艾晨光, 褚明, 孙汉旭, 等. 基准圆光栅偏心检测及测角误差补偿[J]. 光学 精密工程, 2012, 20(11): 2479-2484.

【12】Li H X, Zhang R, Han F T. Error testing and compensation of an inductosyn-based angular measurement system[J]. Journal of Tsinghua University(Science and Technology), 2016, 56(6): 611-616.
李海霞, 张嵘, 韩丰田. 感应同步器测角系统误差测试及补偿[J]. 清华大学学报(自然科学版), 2016, 56(6): 611-616.

【13】Wang X J. Correction of angle measuring errors for large telescopes[J]. Optics and Precision Engineering, 2015, 23(9): 2446-2451.
王显军. 大型望远镜测角系统误差的修正[J]. 光学 精密工程, 2015, 23(9): 2446-2451.

【14】Zhao R J, Ma W L. Improving the accuracy of new-type encoders using error harmonic compensation[J]. Instrumentation Customer, 2009, 16(3): 69-71.
赵人杰, 马文礼. 利用误差谐波补偿法提高金属圆光栅测角精度[J]. 仪器仪表用户, 2009, 16(3): 69-71.

引用该论文

Zhang Wenying,Zhu Haoran,Li Meixuan,Guo Zexuan,Guo Ming. Real-Time In-Situ Calibration for Angle Measuring Sensor Based on Autocollimator[J]. Chinese Journal of Lasers, 2019, 46(4): 0404005

张文颖,朱浩然,李美萱,郭泽萱,郭明. 基于自准直仪的测角传感器实时在位校准方法[J]. 中国激光, 2019, 46(4): 0404005

您的浏览器不支持PDF插件,请使用最新的(Chrome/Fire Fox等)浏览器.或者您还可以点击此处下载该论文PDF