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基于光纤的量子椭圆偏振光测量装置

Fiber based Scheme for Quantum Ellipsometry

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摘要

利用基于光纤的便携式偏振纠缠光子对源作为检测光源,搭建了使用单模光纤进行耦合的量子椭圆偏振光测量装置。实验测量了氧化层厚度为100 nm的氧化膜硅片样品,通过将偏振纠缠光子对中的一路经由氧化膜硅片样品进行反射,然后借助双光子符合计数方法测量反射后的量子态,得到了样品的椭圆偏振参数。当入射到样品上的光子波长为1 558.17 nm,入射角为30°时,通过三次实验所得的椭圆偏振参数(ψ,Δ)的平均值分别为40.23°和173.10°,标准差分别为0.046°和0.403°,测量结果的相对标准偏差小于1%,同时该结果与仿真模拟值相符。

Abstract

Using a fiber-based compact source of entangled photon pairs, we build a single-mode-fiber-coupled scheme for quantum ellipsometry, and measure the ellipsometric parameters for a 100-nm-thick silica film on silicon substrate.The signal photons of the photon pairs are reflected by the sample under test.By performing the two-photon coincidence counting measurement for the entangled states after the reflection, we obtain the ellipsometric parameters of the sample.When the wavelength and incident angle of the photons sent to the sample are 1558.17 nm and 30 °, the measured ellipsometric parameters (ψ,Δ)are 40.23 ° and 173.10 °, with standard deviations 0.046 ° and 0.403 °, respectively.The relative standard deviation of the meausred results is less than 1%, and the results agree well with theoretical predictions.

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中图分类号:O431

DOI:10.3788/jqo20192501.0201

所属栏目:精密测量物理与技术

基金项目:国家自然科学基金(61675148)

收稿日期:2018-10-31

修改稿日期:2018-11-20

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邹雪峰:天津大学 精密仪器与光电子工程学院,光电信息技术教育部重点实验室,天津 300072
李凤娇:天津大学 精密仪器与光电子工程学院,光电信息技术教育部重点实验室,天津 300072
崔亮:天津大学 精密仪器与光电子工程学院,光电信息技术教育部重点实验室,天津 300072
李小英:天津大学 精密仪器与光电子工程学院,光电信息技术教育部重点实验室,天津 300072

联系人作者:邹雪峰(zxf767388@163.com)

备注:邹雪峰(1995-),男,江西宜春人,硕士研究生,主要从事偏振纠缠光子源的制备及应用方面的研究。E-mail:zxf767388@163.com

【1】Fujiwara,Hiroyuki.Spectroscopic Ellipsometry:Principles and Applications[M].John Wiley & Sons,2007:1-3.DOI:10.1002/9780470060193.ch1.

【2】Hinrichs,Karsten.Ellipsometry of Functional Organic Surfaces and Films[M].Berlin:Springer,2014:1-10.DOI:10.1007/978-3-642-40128-2.

【3】Aspnes D E.Spectroscopic Ellipsometry-Past,Present,and Future[J].Thin Solid Films,2014,571:334-344.DOI:10.1016/j.tsf.2014.03.056.

【4】Tompkins H G,Hilfiker J N.Spectroscopic Ellipsometry:Practical Application to Thin Film Characterization[M].Momentum Press,2015:1-5.DOI:10.5643/9781606507285.

【5】Chen Y D,Hsu H Y,Khaleel M I,et al.Study of Biological Reaction in Cancer Cell with Spectroscopic Imaging Ellipsometry[C].Nanoimaging and Nanospectroscopy IV.International Society for Optics and Photonics,2016,9925:992505.DOI:10.1117/12.2236288.

【6】Hansen P E,Madsen J S.Thickness and Refractive Index Analysis of Ellipsometry Data of Ultra-thin Semi-transparent Films[C].Laser Applications to Chemical,Security and Environmental Analysis.Optical Society of America,2018:JM4A.24.DOI:10.1364/3D.2018.JM4A.24.

【7】Arwin H.Application of Ellipsometry Techniques to Biological Materials[J].Thin Solid Films,2011,519(9):2589-2592.DOI: 10.1016/j.tsf.2010.11.082.

【8】Azzam R M.Two-reflection Null Ellipsometer Without a Compensator[J].J Phys E,1976,9(7):569-572.DOI:10.1088/0022-3735/9/7/017.

【9】Chou C,Tsai C C,Teng H K,et al.Balanced Detector Interferometric Ellipsometer[J].J Opt Soc Am A Opt Image Sci Vis,2006,23(11):2871-2879.DOI:10.1364/JOSAA.23.002871.

【10】Abouraddy A F,Jr T K,Sergienko A V,et al.Ellipsometric Measurements by Use of Photon Pairs Generated by Spontaneous Parametric Downconversion[J].Optics Letters,2001,26(21):1717-1719.DOI:10.1364/OL.26.001717.

【11】Abouraddy A F,Toussaint K C,Sergienko A V,et al.Entangled-photon Ellipsometry[J].Journal of the Optical Society of America B,2002,19(4):656-662.DOI:10.1364/JOSAB.19.001174.

【12】Sergienko A V,Saleh B E,Giuseppe G D,et al.Experimental Demonstration of Quantum Ellipsometry[C].Quantum Electronics and Laser Science,2003.QELS.Postconference Digest.IEEE,2003:5.DOI: 10.1109/QELS.2003.238621.

【13】Toussaint K C,Jr,Giuseppe G D,et al.Quantum Ellipsometry using Correlated-photon Beams[J].Physical Review A,2004,70(2):690-690.DOI:10.1103/PhysRevA.70.023801.

【14】Graham D J,Parkins A S,Watkins L R.Ellipsometry with Polarisation-entangled Photons[J].Optics Express,2006,14(16):7037-7045.DOI:10.1364/OE.14.007037.

【15】Simon D S,Jaeger G,Sergienko A V.Quantum Metrology,Imaging,and Communication[M].Springer,2017:94-97 DOI:10.1007/978-3-319-46551-7.

【16】Lee K F,Chen J,Liang C,et al.Generation of High-purity Telecom-band Entangled Photon Pairs in Dispersion-shifted Fiber[J].Optics letters,2006,31(12):1905-1907.DOI:10.1109/CLEO.2006.4628576.

【17】Zeidler J R,Kohles R B,Bashara N M.Beam Deviation Errors in Ellipsometric Measurements;An Analysis[J].Applied Optics,1974,13(8):1938.DOI:10.1364/AO.13.001938.

【18】Lee J,Rovira P I,An I,et al.Rotating-compensator Multichannel Ellipsometry:Applications for Real Time Stokes Vector Spectroscopy of Thin Film Growth[J].Review of Scientific Instruments,1998,69(4):1800-1810.DOI:10.1063/1.1148844.

【19】Nijs J M M D,Silfhout A V.Systematic and Random Errors in Rotating-analyzer Ellipsometry[J].Journal of the Optical Society of America A,1988,5(6):773-781.DOI:10.1364/JOSAA.5.000773.

【20】Nijs J M M D,Holtslag A H M,Hoeksta A,et al.Calibration Method for Rotating-analyzer Ellipsometers[J].Journal of the Optical Society of America A,1988,5(9):1466-1471.DOI:10.1364/JOSAA.5.001466.

引用该论文

ZOU Xue-feng,LI Feng-jiao,CUI Liang,LI Xiao-ying. Fiber based Scheme for Quantum Ellipsometry[J]. Acta Sinica Quantum Optica, 2019, 25(1): 15-21

邹雪峰,李凤娇,崔亮,李小英. 基于光纤的量子椭圆偏振光测量装置[J]. 量子光学学报, 2019, 25(1): 15-21

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