太赫兹成像雷达具有合成孔径时间短、分辨力高的优点，适用于近场探测，但由于器件成熟度相对不高，雷达系统常存在较大的系统失真，会降低信号质量；同时，系统固有延时的存在会引起距离测量误差，二者均会恶化雷达成像的质量。针对系统失真和固有延时，提出了最小二乘法估计的幅相误差补偿方法和固有延时补偿方法，并给出了系统误差的测量方法。试验测试结果表明，用该方法对系统进行补偿后能有效提高图像空间分辨力，改善图像质量。

The terahertz imaging radar is suitable for near field detection because of the advantages of short synthetic aperture time and high resolution. Nevertheless, due to the limitation of device maturity, large distortion of the radar system reduces the signal quality. At the same time, system inherent delay causes the deviation of target range. All of these problems will degrade the imaging quality. In order to solve these problems, the amplitude and phase error compensation method which is estimated by the least square method, and the inherent delay correction method are put forward, and the measurement method of the system distortion is given. The test results show that after compensation, the resolution of image is improved and the quality of imaging is enhanced effectively.