研究了基于绝缘体上硅(SOI)单环以及双环谐振器直通端的滤波特性, 分析了直波导-环波导光耦合系数和环间波导光耦合系数对输出特性的影响。本文提出了在谐振器耦合区采用马赫-曾德尔干涉仪(MZI)的改进耦合结构, 在微环腔长1 218 μm的单环和双环滤波器中, 分别在19 mW和9 mW的功率范围内实现谐振器从欠耦合到临界耦合状态的调谐, 在0~26 mW的功率范围内, 双环滤波器实现了谐振波长一个自由谱范围(FSR)的可调谐滤波特性。

The filter characteristics of the through port in single-ring and double-ring resonators based on silicon-on-insulator were researched, and the influence of the coupling coefficient between the straight-ring waveguide and the coupling coefficient between the ring waveguides on output characteristics were analyzed. An improved coupling structure using the Mach-Zehnder interferometer (MZI) in the coupling region of the resonator was proposed. In the single-ring and double-ring filters with a microring cavity length of 1 218 μm, the resonators were tuned from under-coupled state to the critical-coupled state in the power range of 19 mW and 9 mW, respectively. Moreover, the filter profile of the double-ring filter was tuned for one free spectrum range (FSR) when the heating power was 26 mW.