光电子快报(英文版), 2019, 15 (2): 104, Published Online: Apr. 16, 2019
Optical properties of an Er3+-doped phosphate glasswaveguide formed by single-energy H+ ion implantation
Abstract
In this work, we report the fabrication of an optical waveguide by single-energy H+ ion implantation in the Er3+-doped phosphate glass. The ion implantation conditions are with energy of 0.4 MeV and a fluence of 8.0×1016 ions/cm2. The dark mode spectrum of the waveguide structure was measured by the prism coupling experiment. The refractive index change along with the penetration depth was fitted by using the reflectivity calculation method (RCM). Finally, the calculated near-field light intensity distribution shows superior waveguide properties, which demonstrates its promis-ing potentials for compact optical integrated devices.
CHEN Jing-yi, YAN Sen, ZHENG Rui-lin, ZHANG Liao-lin, GUO Hai-tao, LIU Chun-xiao. Optical properties of an Er3+-doped phosphate glasswaveguide formed by single-energy H+ ion implantation[J]. 光电子快报(英文版), 2019, 15(2): 104.