半导体光电, 2019, 40 (2): 231, 网络出版: 2019-05-05   

ITO/Ag/AgNW新型复合透明导电薄膜性能研究

Study on The Properties of Novel ITO/Ag/AgNW Composite Transparent Conductive Films
作者单位
陕西煤业化工技术研究院有限责任公司, 西安 710065
摘要
采用磁控溅射和湿法涂布技术制备了一种ITO/Ag/AgNW结构的新型复合透明导电薄膜。研究其光学、电学等性能发现: ITO/Ag/AgNW薄膜在400~700nm的平均透过率高于ITO/Ag/ITO薄膜, 且方块电阻远小于ITO/Ag/ITO薄膜, 达到6.9Ω/□; 耐弯折性能测试后, 其方块电阻约增加62%, 达11.2Ω/□。研究结果表明, 这种新型的复合透明导电薄膜具有低阻、高透及耐弯折良好的特性, 在柔性显示领域具有一定的应用潜力。
Abstract
A new kind of ITO/Ag/AgNW composite transparent conductive film was prepared by magnetron sputtering and wet coating technique, which could save the amount of In and reduce the cost. The optical and electrical properties of ITO/Ag/AgNW film were studied, and it shows that its average transmittance (400~700nm) is higher than that of ITO/Ag/ITO film, and the sheet resistance is 6.9Ω/□, which is far less than that of the latter. After the bending test, the sheet resistance is increased by 62%, reaching 11.2Ω/□. Test results indicate that the ITO/Ag/AgNW films present the characteristics of low resistance, high transmittance and excellent bending resistance, showing great applicaiton potential in flexible display.

张晓东, 魏葳, 杨钊, 陈微微, 黄林泉, 田占元. ITO/Ag/AgNW新型复合透明导电薄膜性能研究[J]. 半导体光电, 2019, 40(2): 231. ZHANG Xiaodong, WEI Wei, YANG Zhao, CHEN Weiwei, HUANG Linquan, TIAN Zhanyuan. Study on The Properties of Novel ITO/Ag/AgNW Composite Transparent Conductive Films[J]. Semiconductor Optoelectronics, 2019, 40(2): 231.

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