光学与光电技术, 2019, 17 (2): 34, 网络出版: 2019-05-10
脉冲激光输出参数对光学薄膜损伤阈值的影响
Influence of Pulsed Laser Output Parameters on Optical Film Damage Threshold
脉冲激光输出参数 薄膜损伤阈值 不确定度 单因素控制变量法 pulsed laser output parameters film damage threshold uncertainty single factor control variable method
摘要
激光诱导薄膜损伤阈值的准确测量是判别光学薄膜抗激光损伤能力的重要依据。采用单因素控制变量法, 建立了激光能量误差、聚焦光斑尺寸误差与损伤阈值误差的数值模型, 理论分析了能量误差、聚焦光斑尺寸误差对薄膜损伤阈值的影响, 通过搭建实验平台测量了辐照在薄膜表面的实际能量和聚焦光斑尺寸, 根据实验结果采用统计学原理评估了薄膜损伤阈值不确定度。研究结果表明: 随着能量误差、聚焦光斑尺寸误差的增大, 损伤阈值误差也增大。单层膜样品实例分析, 损伤阈值测量合成不确定度为0.87 J/cm2。因此, 研究能量和聚焦光斑尺寸误差对损伤阈值的影响, 为获得准确的薄膜损伤阈值测试结果提供了方向。
Abstract
Accurate measurement of laser-induced film damage threshold is an important basis for discriminating the ability of optical films to resist laser damage. The numerical model of laser parameters and energy density is established, by using the single factor control variable method. And the influence of energy error and focus spot error are theoretically analyzed. The real energy and focus spot error of irradiated on the film surface are measured by setting up the experimental platform. The statistical principle is used to evaluate the uncertainty of the optical film damage threshold based on the experimental results. The results of the degree study show that the film damage threshold increases with the energy error and the focus spot size error increasing. An example analysis of a single-layer film sample is available, and the total uncertainty of the damage threshold measurement is 0.87 J/cm2 . Therefore, the influence of energy and focus spot size error on the damage threshold is studied, which provides a direction for obtaining accurate measurement results of film damage threshold.
严荣荣, 苏俊宏, 杨利红. 脉冲激光输出参数对光学薄膜损伤阈值的影响[J]. 光学与光电技术, 2019, 17(2): 34. YAN Rong-rong, SU Jun-hong, YANG Li-hong. Influence of Pulsed Laser Output Parameters on Optical Film Damage Threshold[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2019, 17(2): 34.