围绕着八通道 Kirkpatrick-Baez(KB)显微镜在神光 .Ⅲ主机上的应用，分析了瞄准误差对该显微镜成像性能和通道间一致性的影响。通过光线追迹，模拟了 X射线显微镜的空间分辨率、像点间隔和系统效率随视场和物像距的变化。从中心视场到 ±200 μm视场，空间分辨率下降约 2.9 μm；从中心视场到 ±150 μm视场，系统效率降低了约 60%；物距变化量在 ±200 μm范围时，像点间隔变化值约为 0.67 mm，显微镜系统效率变化约为 7%；像距变化量在 ±20 mm范围时，像点间隔变化值约为 0.70 mm。结果表明，视场中心瞄准误差严重影响空间分辨率和效率，但对各通道间的像间隔影响较小。物距和像距误差对像间隔影响较大，但对空间分辨率和系统效率影响较小。

With eight-channel Kirkpatrick-Baez (KB) X-ray microscope applied to China's Shenguang-Ⅲ (SG-Ⅲ) laser facility, the effect of aiming error on imaging performance and the consistency of multichannel KB microscope were analyzed. The spatial resolution, image interval and system efficiency of X-ray microscope were simulated by ray-tracing model as a function of the field of view (FOV), object distance and image distance, respectively. The spatial resolution decreased by about 2.9 μm within range of ±200 μm and the efficiency of microscope system declined by about 60% within range of ±150 μm. The change of image interval and the efficiency of the microscope system were 0.67 mm and 7% respectively, when variety of object distance was changed within ±200 μm. The change of image interval was about 0.70 mm, when the image distance varies within range of ±20 mm. The results indicated that the aiming error of central FOV had a great effect on spatial resolution and system efficiency but it had no significant effect on image interval. The aiming error of object distance has impact upon image interval while it has lower influence on spatial resolution and system efficiency.