半导体光电, 2019, 40 (3): 333, 网络出版: 2019-07-09  

基于HV-CMOS工艺集成PIN光敏元的CMOS传感器设计

Design of CMOS Sensor Integrated with PIN Photodiodes by HV-CMOS Process
杨成财 1,2,*鞠国豪 1,2,3陈永平 1
作者单位
1 中国科学院上海技术物理研究所 红外成像材料与器件重点实验室, 上海 200083
2 中国科学院大学, 北京 100049
3 上海科技大学 信息科学与技术学院, 上海 201210
摘要
PIN光电二极管相对于pn结型光电二极管具有结电容小、量子效率高等优点,但采用标准低压CMOS(LV-CMOS)工艺研制的CMOS传感器只能实现基于n阱/p衬底的pn结光敏元与片上电路的集成,高压CMOS(HV-CMOS)工艺的发展为CMOS电路与PIN光敏元列阵的单片集成提供了可能。基于HV-CMOS工艺设计了一种集成PIN光敏元列阵的CMOS传感器,并对器件的光电响应进行了测试评估。结果表明,集成PIN光敏元的CMOS传感器具有更高的像素增益和量子效率,而暗电流、输出摆幅、线性度等特性保持良好。在500~900nm宽波段范围内,器件的量子效率均达到80%以上,在950nm附近的量子效率达到25%,优于采用其他工艺制作的CMOS传感器。
Abstract
Compared with pn photodiodes, PIN photodiodes present the advantages of small junction capacitance and high quantum efficiency. However, the CMOS sensors fabricated with standard low-voltage CMOS (LV-CMOS) process can only realize the integration of pn photosensitive elements formed by n-well/p substrates and on-chip circuits. The development of high voltage CMOS (HV-CMOS) process makes it possible to integrate CMOS circuits with PIN photosensitive elements on a single chip. In this paper, based on HV-CMOS process, the CMOS sensor integrated with PIN photosensitive array was designed, and the photoelectric response of the device was tested and evaluated. The results show that CMOS sensor integrated with PIN photosensitive elements has higher pixel gain and quantum efficiency, while its dark current, output swing, linearity and other properties remain good. The quantum efficiency of the devices is higher than 80% in the broad band range of 500~900nm, and reaches 25% near 950nm, which is better than that of CMOS sensors fabricated with other processes.

杨成财, 鞠国豪, 陈永平. 基于HV-CMOS工艺集成PIN光敏元的CMOS传感器设计[J]. 半导体光电, 2019, 40(3): 333. YANG Chengcai, JU Guohao, CHEN Yongping. Design of CMOS Sensor Integrated with PIN Photodiodes by HV-CMOS Process[J]. Semiconductor Optoelectronics, 2019, 40(3): 333.

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!