半导体光电, 2019, 40 (3): 355, 网络出版: 2019-07-09  

面向扑翼微飞行器的扭矩传感器研究

Research on Torque Sensor for Flapping Wing Micro Aircraft
作者单位
上海交通大学 电子信息与电气工程学院 微纳电子学系 微米/纳米加工技术重点实验室 薄膜与微细技术教育部重点实验室, 上海市北斗导航与位置服务重点实验室, 上海 200240
摘要
由于仿昆虫扑翼微飞行器需要在小范围内传输扭矩,且扭矩数值较小,一般的扭矩传感器或力传感器在其动态范围内均难以达到测量精度的要求。为了解决这一问题,提出了一种新型单轴扭矩传感器的设计方案,并完成了实际的制造和测试。该扭矩传感器的主体为殷钢材料,由激光加工制作而成,利用电容式位移传感器测量主轴旋转时目标板的位移,从而建立输出电压与施加扭矩之间的对应关系。传感器带宽和分辨率与微飞行器飞行实验的标准相匹配,同时对离轴负载保持不敏感。经实验测定,该单轴扭矩传感器的带宽为1.1kHz,测量范围为±260.8μNm,分辨率为0.013μNm,可以满足微飞行器扭矩的测量需求。
Abstract
The micro aircraft with insect-like flapping wings needs to transmit torque in a small range and the torque value is small, so it is difficult for the general torque sensor or force sensor to meet the requirements of measurement accuracy in its dynamic range. In order to solve this problem, a new design scheme of uniaxial torque sensor was proposed, and the practical manufacture and test were completed. The main body of the torque sensor is Invar steel processed with laser, and capacitive displacement sensor was used to measure the displacement of the target plate when the spindle rotates, so as to establish the corresponding relationship between the output voltage and the applied torque. The sensor bandwidth and resolution are in line with the micro aircraft flight test standards while remaining insensitive to off-axis loads. Experimental results indicate that the bandwidth of the single-axis torque sensor is 1.1kHz, the measurement range is ±260.8μNm and the resolution is 0.013μNm, meeting the measuring requirement of torque of micro aircrafts.

周靖, 张卫平, 邹阳, 王晨阳, 孟冉, 靖霄. 面向扑翼微飞行器的扭矩传感器研究[J]. 半导体光电, 2019, 40(3): 355. ZHOU Jing, ZHANG Weiping, ZOU Yang, WANG Chenyang, MENG Ran, JING Xiao. Research on Torque Sensor for Flapping Wing Micro Aircraft[J]. Semiconductor Optoelectronics, 2019, 40(3): 355.

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