光子学报, 2019, 48 (6): 0614002, 网络出版: 2019-07-10
飞秒激光诱导硬质合金YG6表面累积效应
Surface Incubation Effect of Carbide YG6 Induced by Femtosecond Laser
特种加工 飞秒激光 累积效应 损伤阈值 硬质合金YG6 微织构 Special manufacturing Femtosecond laser Incubation effect Ablation threshold Carbide YG6 Micro-texture
摘要
采用波长800 nm的飞秒激光对硬质合金YG6表面进行多脉冲加工, 利用光学显微镜测量微凹坑损伤形貌及损伤直径, 研究了飞秒激光在不同能量密度和脉冲数下硬质合金YG6的损伤阈值和损伤直径的变化规律及其损伤机制.试验结果表明: 硬质合金YG6的多脉冲损伤阈值随着脉冲数增加而降低, 呈现明显的累积效应.试验得到了多脉冲飞秒激光加工YG6的损伤阈值、损伤直径与脉冲数及中心能量密度的定量关系, YG6多脉冲损伤阈值主要与脉冲数相关, 由单脉冲损伤阈值和累积系数共同决定, 试验得到YG6单脉冲损伤阈值为1.14±0.06 J/cm2, 累积系数为0.84±0.02.损伤直径主要与光束中心能量密度和脉冲数相关, 由光束束腰半径, 单脉冲损伤阈值和累积系数共同决定.试验采用多组平均功率和脉冲数对YG6进行烧蚀, 验证了单脉冲损伤阈值和累积系数的可靠性.
Abstract
A femtosecond laser with wavelength of 800 nm was used to process the micro-pits array on the surface of carbide YG6. The change of ablation threshold and ablation diameter of carbide YG6 and its ablation mechanism under different energy density and pulse number were studied by optical profiler. The result of the test shows that the multi-pulse ablation threshold of carbide YG6 decreases with the increase of the pulses number and it shows a significant accumulation effect. The quantitative relationship among ablation threshold, ablation diameter, pulses number and central energy density of multi-pulse femtosecond laser processing YG6 was obtained. The multi-pulse ablation threshold of YG6 is mainly related to the number of pulses, which is determined by ablation threshold of single pulse and accumulation coefficient. The result of the test shows that the laser ablation threshold of YG6 is 1.14±0.06 J/cm2 and accumulation coefficient is 0.84±0.02. The ablation diameter is mainly related to the energy density and the number of pulses at the center, which is determined by the beam waist radius, the ablation threshold of single pulse and the accumulation coefficient. The YG6 was ablated by multi-group average power and pulse number, which verified the reliability of the ablation threshold of single pulse and accumulation coefficient.
杨奇彪, 张弘, 周维, 陈中培, 陶青, 刘顿. 飞秒激光诱导硬质合金YG6表面累积效应[J]. 光子学报, 2019, 48(6): 0614002. YANG Qi-biao, ZHANG Hong, ZHOU Wei, CHEN Zhong-pei, TAO Qing, LIU Dun. Surface Incubation Effect of Carbide YG6 Induced by Femtosecond Laser[J]. ACTA PHOTONICA SINICA, 2019, 48(6): 0614002.