半导体光电, 2019, 40 (4): 463, 网络出版: 2019-09-20
8×16四位相光栅分光器优化设计
Optimal Design of 8×16 Phase Grating Beam Splitter
多位相光栅分光器 模拟退火优化算法 光互连 multiphase grating spectrometer simulated annealing optimization algorithm optical interconnection
摘要
设计了二维多位相光栅分光器的位相结构, 并根据周期性位相结构推导出位相光栅的二维分光公式, 使用模拟退火优化算法对二维8×16四位相光栅分光器的位相结构进行了优化设计, 得到了二维分光效率为70.03%、不均匀度仅为4.6×10-4的位相光栅。将优化计算得到的位相分布结果进行拆分, 制作了光刻版, 利用光刻版套刻制作了四位相光栅分光器样品, 并搭建光路对样品的分光性能进行了测试, 结果表明, 多位相结构能显著提高光栅的分束效率和均匀性。
Abstract
The phase structure of two-dimensional multi-phase grating beam splitter was designed, and the two-dimensional spectral formula of phase grating was deduced according to the periodic phase structure. The phase structure of two-dimensional 8×16 four-phase grating spectrometer was optimized by simulating annealing optimization algorithm. The phase grating with two-dimensional spectral efficiency of 70.03% and non-uniformity of 4.6×10-4 was obtained. The optimized results of phase distribution were separated and photolithographic plates were fabricated. Four-phase grating spectroscope samples were fabricated by photolithographic plate overlaying. The spectroscopic performance of the samples was tested by setting up an optical path. The results show that the multi-phase structure can significantly improve the beam splitting efficiency and uniformity of the grating.
杨少睿, 罗风光, 刘豪, 王浩宇. 8×16四位相光栅分光器优化设计[J]. 半导体光电, 2019, 40(4): 463. YANG Shaorui, LUO Fengguang, LIU Hao, WANG Haoyu. Optimal Design of 8×16 Phase Grating Beam Splitter[J]. Semiconductor Optoelectronics, 2019, 40(4): 463.