针对准分子激光加工PMMA薄板上的微孔形貌进行研究, 首先分析了激光脉冲数目对微孔深度的影响, 进一步探究了激光脉冲数、激光单脉冲能量和激光脉冲频率等参数对微孔锥度的影响。利用光学显微镜和扫描电镜对打孔效果进行观察, 结果表明, 在一定范围内, 微孔深度随激光脉冲数目线性增加, 而微孔锥度随激光脉冲数目线性降低, 微孔锥度随激光单脉冲能量线性降低, 且影响效果显著; 激光脉冲频率对微孔锥度无影响。通过合理选择激光脉冲个数, 适当选择较低的单脉冲能量, 可以得到较大深度和一定锥度且加工质量良好的锥形微孔。

In this paper, the morphology of micro-holes on PMMA thin plate manufactured by excimer laser is studied. The influence of laser pulse number on the micro-hole depth is firstly analyzed, and the influence of laser pulse number, laser single pulse energy and laser pulse frequency on the micro-hole taper is further explored. Drilling efficient was observed by optical microscope and SEM. It was showed that in a certain range, the pore depth increases linearly with the number of laser pulses, while the micro-hole taper decreases linearly with the number of laser pulses, and the micro-hole taper decreases linearly with the laser single pulse energy, All the effects are significant. Meanwhile, the laser pulse frequency has no effect on the micro-hole taper. By selecting proper number of laser pulses and low single pulse energy properly, a conical micro- hole with good quality can be obtained with a large depth and a certain taper.