为了实现对电磁悬浮微镜绕轴向-180°到+180°角度的旋转控制.对该系统所采用的电磁悬浮、静电驱动、转角闭环控制等进行研究。首先, 设计和制造了电磁悬浮微镜的定子和转子结构。接着, 对通过线圈的电流频率、电流大小与悬浮高度的关系进行仿真和实验, 实验结果和仿真结果基本一致。然后, 在分析变电容驱动原理的基础上, 进行旋转控制实验, 说明在按相序通电情况下, 转子能实现旋转。最后, 介绍了采用高精度的电容检测的转角闭环控制系统。实验结果表明: 在激励电流峰-峰值是0.5 A, 激励频率为20 MHz时, 转子悬浮到100 μm高度, 能够实现指定角度的控制, 基本满足电磁悬浮微镜的控制要求。

In order to realize the rotation control of an electromagnetic levitation micromirror from -180° to +180°, the electromagnetic levitation, electrostatic drive, and closed-loop angle control used in this system were studied. First, the stator and rotor structures were designed and fabricated. Then, the relationship between levitation height and the frequency and amplitude applied to the coil were simulated and tested. The experimental results showed good agreement with the simulation results. On the basis of the analysis of the driving principle of variable capacitance, the rotation control experiment was performed, which showed that the rotor can rotate under the energizing condition in the phase sequence. Finally, a closed-loop control system with high-precision capacitance detection was introduced. The experimental results show that when the excitation current p-p value is 0.5 A and the excitation frequency is 20 MHz, suspension of the rotor at height of 100 μm can control the specified angle and meet the control requirements of the electromagnetic suspension micromirror.