随着MEMS惯性传感器件对微位移检测精度的要求越来越高, 微位移检测技术已经成为MEMS惯性传感领域的研究热点。亚波长光栅以其超高的位移检测灵敏度成为一个极具发展前景的高精度位移传感平台。利用Rsoft软件模拟分析了双层亚波长光栅共面、离面相对运动时系统零级衍射光透射率与光栅位移量之间的关系及系统关键结构参数对位移检测灵敏度的影响, 并对这两种亚波长光栅微位移传感系统进行了结构优化与性能仿真及对比, 理论验证了亚波长光栅位移检测的高灵敏度优势。

In this paper, the relationship between the transmittance of zero-order diffracted light and the in-plane and out-of-plane displacement of the dual subwavelength gratings was analyzed, and the influence of key structural parameters on the sensitivity of the displacement detection was simulated with Rsoft software. The structure of the sensing system was optimized and simulations were performed to make comparisons on its performance. The high sensitivity of sub-wavelength grating displacement detection was verified in theory.