半导体光电, 2019, 40 (5): 649, 网络出版: 2019-11-05  

基于介电泳力的单根纳米线组装仿真与实验研究

Simulation and Experimental Study on Assembly of Single Nanowire Based on Dielectrophoresis
作者单位
上海电力大学 电子与信息工程学院, 上海 200090
摘要
为将单根纳米线成功组装至微电极两端, 在介电泳力的基础上附加考虑粘滞阻力及布朗力的影响, 建立了单根纳米线受力及运动模型, 通过数值仿真得到纳米线在三维空间中的运行轨迹, 并基于可控介电泳工作区模型(DWS-DEP)获得了可实现准确跨接的初始点分布区。为选择合适的电极组装单根纳米线, 对三种不同尖端弧度的电极稳态区进行仿真, 结果显示圆弧状电极更易实现一维纳米结构的跨接组装。利用所设计的Ti/Au电极进行纳米线介电泳组装实验, 得到了与仿真相一致的结果。
Abstract
In order to assemble a single nanowire to both ends of the microelectrodes successfully, besides dielectrophoretic force, the influence of viscous drag and Brownian force was taken into account to establish the force and motion model of a single nanowire. The trajectory of the nanowire in three-dimensional space was obtained by numerical simulation, and the initial point distribution area which can realize accurate crossing was obtained based on a controllable dielectrophoretic working space model (DWS-DEP). In order to select a suitable electrode shape to assemble asingle nanowire, quasi-stable region of three kinds of electrodes with different tip radians were simulated. The results show that the circular electrodes are easier to realize the cross-assembly of one-dimensional nanostructures. The designed Ti/Au electrode was used to assemble a single nanowire by dielectrophoresis, and the experimental results were in good agreement with the simulation results.

黄蓉, 刘伟景, 孙宁, 叶子, 匡旭良, 谷洋, 黄宁. 基于介电泳力的单根纳米线组装仿真与实验研究[J]. 半导体光电, 2019, 40(5): 649. HUANG Rong, LIU Weijing, SUN Ning, YE Zi, KUANG Xuliang, GU Yang, HUANG Ning. Simulation and Experimental Study on Assembly of Single Nanowire Based on Dielectrophoresis[J]. Semiconductor Optoelectronics, 2019, 40(5): 649.

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