半导体光电, 2019, 40 (5): 655, 网络出版: 2019-11-05
铌酸锂波导质子交换温度控制及折射率分布研究
Study on Proton-Exchange Temperature Control and Refractive Index Distribution of Lithium Niobate Waveguide
铌酸锂波导 PID温度控制 质子交换 H+浓度纵向分布 折射率纵向分布 lithium niobate waveguides PID temperature control proton exchange longitudinal distribution of H+ concentration longitudinal distribution of refractive index
摘要
针对铌酸锂波导质子交换的精确控制提出了一种预热-反应方法, 建立了质子交换温控模型, 并对该模型进行了PID控制参数整定和温度波动误差分析, 在此基础上研究了质子交换过程中温度波动对H+浓度纵向分布的影响。采用预热-反应方法制作了波导样本, 实验测试了其折射率纵向分布, 并与传统工艺制作的波导样本测试结果进行对比, 验证了所提方法对质子交换精确控制的有效性。实验表明: 预热-反应方法折射率分布同理论计算折射率分布结果吻合更好。
Abstract
A preheating-reaction method was proposed for the precise control of proton-exchange process of lithium niobate waveguides, and a temperature control model was established. Analysis was performed on the PID control parameter setting and temperature fluctuation error of the proton-exchange temperature control model. The effect of temperature fluctuations during the proton-exchange process on the longitudinal distribution of H+ concentration was investigated. The waveguide sample was fabricated with the preheating-reaction method, and the longitudinal distribution of the refractive index was tested. The results were compared with those of the conventional waveguide samples to verify the effectiveness of the method for proton-exchange control.
宋凝芳, 戴念, 宋镜明, 刘嘉琪. 铌酸锂波导质子交换温度控制及折射率分布研究[J]. 半导体光电, 2019, 40(5): 655. SONG Ningfang, DAI Nian, SONG Jingming, LIU Jiaqi. Study on Proton-Exchange Temperature Control and Refractive Index Distribution of Lithium Niobate Waveguide[J]. Semiconductor Optoelectronics, 2019, 40(5): 655.