报道了 910 nm高峰值功率垂直腔面发射半导体激光器列阵(Vertical Cavity Surface Emitting Laser,VCSEL)的设计方法及测试结果。所制备的 910 nm VCSEL列阵在准连续工作时激光功率达到 2W; 在重复频率 10 kHz,脉冲宽度 30 ns,工作电流 60 A的电脉冲驱动条件下, VCSEL列阵峰值输出功率达到 25.5 W。随着工作电流的增加, VCSEL列阵输出的激光光谱呈现明显的展宽现象,证实 VCSEL列阵即使在窄脉冲工作时大的电流驱动仍然会产生严重的内部热效应; VCSEL列阵输出激光的光脉冲波形在驱动电流增大至 60 A时脉宽仅展宽了 6 ns左右,证实 VCSEL阵列具有非常优越的脉冲响应特性。对 VCSEL列阵进行光束准直处理后,在 1m距离处得到了近圆形的均匀光斑。我们相信这种高功率的 910 nm面阵光源在未来汽车光探测测距(LiDAR)等智能驾驶领域具有很大的应用潜力。

This paper presents the design method and test results of a 910 nm high peak power vertical-cavity surface-emitting laser(VCSEL)array. More than 2W output power was achievedfor 910 nm VCSEL array under the Quasi-CWdriving current. Under the electric pulseddriving condition with a repetition frequency of 10k Hz and a pulse width of 30 ns, the peak output power of a single VCSEL array reached 25.5 W at 60A operating current. With the increase of operating current,the laser spec-trum outputted by VCSEL array shows obvious broadening phenomenon,which proves that the large current drive ofVCSEL array will still produce serious internal thermal effect even at the operation of narrow pulse. When the driving current increases to 60A,the pulse width ofthe laser pulse waveform of VCSEL array only widens by about 6 ns. This proves that VCSEL array has A very superior impulse response characteristic. After beam collimation ofVCSELarray,nearly circular uniform spot was ob-tained atadistance of1 m. We believe that this kind of high power 910 nm array light source has great application potential in the future intelligent driving fields such as vehicle light detection and ranging (LiDAR).