准分子激光的能量利用率成为制约其在加工领域进一步发展的重要因素。为了解决这一问题开展了用于准分子激光汇聚的新型拉锥光学元件的研究与设计。通过对拉锥石英管外部轮廓的提取和模拟, 结合拉锥过程中熔融区的变化规律, 得到拉锥区域的曲线函数, 通过与大量拉锥石英玻璃管的外部轮廓数据进行对比修正, 最终得到拉锥形状函数。基于形状函数模拟元件实际形状, 通过对光束的追迹以及损耗的计算, 模拟光束的实际损耗和光斑形状。最后基于模拟结果的函数曲线制作拉锥光学元件。准分子激光通过该光学系统后可于出光口得到一个内环直径为100 μm的圆形光斑, 光能的利用率在80%左右, 解决了准分子激光光斑形状不规则和能量分布不均匀的问题。

The energy utilization rate of excimer lasers has become an important factor restricting its further development in the processing field. In order to solve this problem, this paper carried out research and design of a new type of tapered optical element for excimer laser convergence. Through the extraction and simulation of the outer contour of the taper quartz tube, combined with the variation of the melting zone during the taper process, the curve function of the taper region is obtained, which is corrected and compared with the outer contour data of a large number of taper quartz glass tubes. Get the taper shape function. Based on the shape function to simulate the actual shape of the component, the actual loss and spot shape of the beam are simulated by the tracking of the beam and the calculation of the loss. Finally, a taper optical element is fabricated based on the function curve of the simulation result. After the excimer laser passes through the optical system, a circular spot with an inner ring diameter of 100 μm can be obtained at the light exiting port, and the utilization rate of light energy is about 80%, which solves the problem that the excimer laser spot shape is irregular and the energy distribution is uneven.