光子学报, 2019, 48 (11): 1148019, 网络出版: 2019-12-10  

网格结构微环谐振电光开关阵列的特性分析

Analysis of Cross-grid Microring Resonator Electro-optic Switch Array
作者单位
吉林师范大学 吉林省高校光电材料与器件工程中心, 信息技术学院, 吉林 四平 136000
摘要
设计了由N+1条水平通道、N条竖直通道和2N个微环构成的电光开关阵列器件,并对其传输特性进行了分析.通过在列微环上加载不同的工作电压,实现相应通道的开关功能.以5×4通道8微环结构为例,取波导芯的宽度与厚度均为1.5 μm,波导芯与电极之间的限制层厚度为2.0 μm,电极厚度为0.05 μm,微环与通道之间的耦合距离为0.1 μm.当开关电压为8 V时,该器件的插入损耗在2.79~4.31 dB范围内,串扰在-20 dB以下,消光比在12.5 dB以上.
Abstract
The electro-optic switch array device with N+1 horizontal channels, N vertical channels and 2N microrings is designed, and the transmission characteristics are analyzed. When the operation voltage is applied on the microrings in the array unit in various ways, the switching function of the corresponding horizontal channel can be realized. Taking the structure of 5×4 channels and 8 microrings as an example, the width and thickness of the waveguide core are chosen as 1.5 μm, the thickness of the buffer layer between the waveguide core and electrode is set as 2.0 μm, the thickness of the metal electrode and the coupling gap between the microring and channel are selected as 0.05 μm and 0.1 μm, respectively. When the switching voltage is 8 V, the insertion loss of the structure ranges between 2.79 and 4.31 dB, the crosstalk is below -20 dB,and the extinction ratio is over 12.5 dB.

汪玉海, 贺可川, 马宁伯, 王春旭, 张永玲, 宋明星, 王国峰, 秦政坤. 网格结构微环谐振电光开关阵列的特性分析[J]. 光子学报, 2019, 48(11): 1148019. WANG Yu-hai, HE Ke-chuan, MA Ning-bo, WANG Chun-xu, ZHANG Yong-ling, SONG Ming-xing, WANG Guo-feng, QIN Zheng-kun. Analysis of Cross-grid Microring Resonator Electro-optic Switch Array[J]. ACTA PHOTONICA SINICA, 2019, 48(11): 1148019.

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