声纳系统是水下**装备的重要组成部分, 其发展趋向隐蔽性、小型化。文章提出了一种基于小型化三元阵列式微机电系统(MEMS)水听器的被动定位系统。首先, 设计了一种三元阵列式MEMS水听器, 即在同一芯片上集成三个不同角度偏差的MEMS矢量敏感单元; 其次, 在充分分析水听器工作原理的基础上建立了阵列式水听器的定位模型, 并通过仿真验证了其设计的合理性; 最后, 以STM32单片机为控制核心设计了阵列式MEMS水听器的信号处理与目标定位系统。这种三元阵列式MEMS水听器在仿真定位中展现了良好的定位精度, 充分证明了本系统设计的正确性及实用性。

Sonar system is an important part of underwater weapons, and it tends to be concealed and miniaturized. In this paper, a passive positioning system was proposed based on a miniaturized ternary array micro-electromechanical systems (MEMS) hydrophone. Firstly, a ternary array MEMS hydrophone was designed, that is, three MEMS vector sensitive units with different angle deviation were integrated on the same chip. Secondly, based on analyzing working principles of the hydrophone, the positioning model of the array hydrophone was established, and its design rationality was verified by simulations. Finally, using STM32 microcontroller as the control core, the signal processing and target positioning system of the array MEMS hydrophone was designed. The designed hydrophone presents good positioning accurcy in simulations, fully proving the correctness and practicality of the designed system.