以四氯化钛和五氯化钼为原料, 采用氨气还原氮化法制备出Mo2N/TiN复合薄膜。利用XRD、XPS、SEM、UV-Vis和Raman测试手段研究了薄膜组成、形貌、表面增强拉曼光谱性能。结果表明, 复合薄膜中TiN和Mo2N两种物相共存, 随着五氯化钼掺量增加, 复合薄膜中晶粒逐渐细化, 其吸收光谱位于400～600 nm的共振吸收峰峰强增加且逐渐宽化。利用罗丹明6G(R6G)作为探针分子探究Mo2N/TiN复合薄膜的表面增强拉曼性能, 研究发现, 当五氯化钼添加量为6%时, 复合薄膜的表面增强拉曼效应最佳, 检测极限为10-5 mol/L, 增强因子为0.31×103, 且放置6个月后其拉曼增强性能仅降低20.76%。同时复合薄膜具有一定的耐高温特性, 其经过500 ℃退火后仍具有表面增强拉曼特性, 具有重复利用的潜力。

Mo2N/TiN composite thin films were prepared by ammonia reduction nitridation method using titanium tetrachloride and molybdenum pentachloride as materials. The composition, morphology and surface enhanced Raman spectroscopy of the composite films were studied through XRD, XPS, SEM, UV-Vis and Raman testing. The results indicated that the TiN and Mo2N coexisted in the composite film. With the increase of molybdenum pentachloride content, there was an obvious resonance absorption peak in the range of 400-600 nm, and the absorption peak intensity and peak width increased. The surface enhanced Raman spectroscopy properties of Mo2N/TiN composite films were studied using Rhodamine 6G as probe molecule. When the addition amount of the molybdenum pentachloride was 6%, the Raman enhancement effect of the composite films was the best, and the detection limit was 10-5 mol/L. Raman enhancement factor was 0.31×103. Meanwhile the surface enhanced Raman performance decreased only 20.76% after it was stored in air for 6 months. At the same time, the composite films had high temperature stability, and they still had surface enhanced Raman characteristics after annealing at 500 ℃, therefore, they have the potential of reuse as SERS substrate.