为了实现单晶背钝化PERC电池最优化背钝化效果，找出最佳工艺条件，利用正交实验方法对主要工艺参数因素进行了最优化研究。采用掺镓P型单晶硅片经过背钝化后测试膜厚、折射率以及电池片最终的转化效率等电学性能参数。通过正交实验表明，背钝化的最优化工艺条件为0.25 mbar的工艺腔压强、360 ℃温度设定、2.8的NH3/SiH4比率、1 500 W的微波功率，在该条件下电池的平均测试效率可达22.35%，且Voc以及Isc等电学性能指标均达到较高水平。

In order to achieve the optimal back passivation effect of monocrystal PERC cell and find out the optimal process conditions, the main process parameters were optimized by orthogonal experimental method. After being passivated by back passivation, the thickness and refractive index of the film and the conversion efficiency of the cell were measured. The results of orthogonal experiments show that the optimal process conditions of back passivation are 0.25 mbar chamber pressure, 360 ℃ temperature setting, 2.8 NH3/SiH4 ratio, 1 500 W microwave power. Under this conditions, the average test efficiency of the cell reaches 22.35%, and the electrical performance indexes such as Voc and Isc reach a high level.