红外与毫米波学报, 2020, 39 (6): 791, 网络出版: 2021-01-20
可见光和近红外双带通薄膜滤光片的光谱调控
摘要
空间对地观测的遥感相机中需要基于干涉薄膜的双光谱通道滤光片,在同一几何点上同时形成可见光(波长500~720 nm)和近红外(波长(1 064±1) nm)两个光谱通道。这两个光谱通道的光谱位置和透射强度均需要进行精确控制。选用JGS-1石英玻璃作为滤光片基片,氧化钽(Ta2O5)和氧化硅(SiO2)分别作为高、低折射率薄膜,由双离子束溅射沉积方法将52层和88层介质薄膜分别镀制在基片的两个表面上。500~720 nm波段的平均透过率达到92%,(1 064±1)nm 波段的峰值透过率控制在(26±1)%的范围。
Abstract
A remote sensing camera needs a thin-film filter with visible (wavelength 500~720 nm) and near infrared (wavelength (1 064±1) nm) dual band-pass spectrum channels at any same geometric position. The spectrum and transmission of the two channels need was modulated accurately. JGS-1 fused quartz was used as the substrate, Ta2O5 and SiO2 thin film was used as high (H) and low (L) reflective index layers respectively. 52 and 88 layers was deposited on the two surfaces of substrate by dual ion beam sputtering method. The average transmission of 500~720 nm band reaches 92%, and the peak transmission of (1 064±1) nm band controlled in the range of (26±1)%.
陈刚, 刘定权, 马冲, 王凯旋, 张莉, 高凌山. 可见光和近红外双带通薄膜滤光片的光谱调控[J]. 红外与毫米波学报, 2020, 39(6): 791. Gang CHEN, Ding-Quan LIU, Chong MA, Kai-Xuan WANG, Li ZHANG, Ling-Shan GAO.