Photonics Research, 2019, 7 (9): 09000961, Published Online: Aug. 2, 2019
Compact CMOS spectral sensor for the visible spectrum Download: 830次
Abstract
A compact single-shot complementary metal-oxide semiconductor (CMOS) spectral sensor for the visible range (wavelength 400–700 nm) is presented. The sensor consists of two-dimensional silicon nitride-based photonic crystal (PC) slabs atop CMOS photodetectors. The PC slabs are fabricated using one-step lithography and amenable to monolithic integration into CMOS image sensors. Featuring a small footprint of , the sensor can successfully measure the spectra over the 400–700 wavelength range with a best resolution of 1 nm. The footprint of the sensor may be further reduced to enable hyperspectral imaging with high spatial resolution.
Yibo Zhu, Xin Lei, Ken Xingze Wang, Zongfu Yu. Compact CMOS spectral sensor for the visible spectrum[J]. Photonics Research, 2019, 7(9): 09000961.