Photonics Research, 2020, 8 (2): 02000194, Published Online: Feb. 10, 2020  

3D integrated photonics platform with deterministic geometry control Download: 727次

Author Affiliations
1 Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA
2 Department of Biological Engineering, University of Delaware, Newark, Delaware 19716, USA
3 Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou 310024, China
4 Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou 310024, China
5 College of Optics & Photonics, University of Central Florida, Orlando, Florida 32816, USA
6 College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
7 e-mail: xjia@udel.edu
8 e-mail: hujuejun@mit.edu
Abstract
3D photonics promises to expand the reach of photonics by enabling the extension of traditional applications to nonplanar geometries and adding novel functionalities that cannot be attained with planar devices. Available material options and device geometries are, however, limited by current fabrication methods. In this work, we pioneer a method that allows for placement of integrated photonic device arrays at arbitrary predefined locations in 3D using a fabrication process that capitalizes on the buckling of a 2D pattern. We present theoretical and experimental validation of the deterministic buckling process, thus demonstrating implementation of the technique to realize what we believe to be the first fully packaged 3D integrated photonics platform. Application of the platform for mechanical strain sensing is further demonstrated.

Jérôme Michon, Sarah Geiger, Lan Li, Claudia Goncalves, Hongtao Lin, Kathleen Richardson, Xinqiao Jia, Juejun Hu. 3D integrated photonics platform with deterministic geometry control[J]. Photonics Research, 2020, 8(2): 02000194.

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