光学学报, 2020, 40 (7): 0722001, 网络出版: 2020-04-15   

深紫外光刻照明系统的微反射镜阵列公差分析 下载: 972次

Tolerance Analysis of Micromirror Array in Deep Ultraviolet Lithography Illumination System
作者单位
北京理工大学光电学院光电成像技术与系统教育部重点实验室, 北京 100081
摘要
为满足45 nm及其以下节点光刻技术对照明系统的需求,将深紫外光刻照明系统的光束整形单元所采用的微反射镜阵列(MMA)作为关键器件,以实现满足光源-掩模联合优化(SMO)技术需求的任意照明光源。根据MMA结构参数和加工制造调整特性,分析MMA角度误差类型。在此基础上,利用蒙特卡罗公差分析法模拟实际加工制造调整的过程,通过分析微反射镜角度误差对曝光结果的影响,制定了满足曝光要求的角度公差。结果显示,当MMA在正交方向上的角度调整公差和加工角度公差分别在(±0.04°,±0.06°)、(±0.04°,±0.04°)范围内时,系统曝光得到的特征尺寸误差(CDE)在98.1%的置信概率下小于0.33 nm。
Abstract
To meet the illumination system requirements of 45 nm and below node lithography technology, the micromirror array (MMA) used in the beam shaping unit of deep ultraviolet lithography illumination system is used as the key device to produce the freeform source required by the source-mask optimization(SMO) technology. Based on the structural parameters of MMA as well as the manufacture and adjustment characteristics, the angle error types of MMA are analyzed. On this basis, the Monte-Carlo tolerance analysis method is used to simulate the actual manufacture and adjustment processes. After the influence of the micromirror angle error on the exposure results is investigated, the angle tolerance that meets the exposure requirements is established. The results show that when the angle adjustment tolerance and the process angle tolerance of MMA in the orthogonal direction are within the scope of (±0.04°, ±0.06°) and (±0.04°, ±0.04°), respectively, the critical dimension error (CDE) obtained by exposure is less than 0.33 nm at a confidence probability of 98.1%.

尹超, 李艳秋, 闫旭, 刘克, 刘丽辉. 深紫外光刻照明系统的微反射镜阵列公差分析[J]. 光学学报, 2020, 40(7): 0722001. Chao Yin, Yanqiu Li, Xu Yan, Ke Liu, Lihui Liu. Tolerance Analysis of Micromirror Array in Deep Ultraviolet Lithography Illumination System[J]. Acta Optica Sinica, 2020, 40(7): 0722001.

本文已被 2 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!