Photonics Research, 2020, 8 (7): 07001177, Published Online: Jun. 16, 2020   

Reconfigurable nano-kirigami metasurfaces by pneumatic pressure Download: 552次

Author Affiliations
1 Key Laboratory of Advanced Optoelectronic Quantum Architecture and Measurement (Ministry of Education), Beijing Key Laboratory of Nanophotonics & Ultrafine Optoelectronic Systems, and School of Physics, Beijing Institute of Technology, Beijing 100081, China
2 School of Science, Minzu University of China, Beijing 100081, China
3 Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
4 e-mail: hlguo@muc.edu.cn
5 e-mail: jiafangli@bit.edu.cn
Abstract
Tunable/reconfigurable metasurfaces that can actively control electromagnetic waves upon external stimuli are of great importance for practical applications of metasurfaces. Here, we demonstrate a reconfigurable nano-kirigami metasurface driven by pneumatic pressure operating in the near-infrared wavelength region. The metasurfaces consist of combined Archimedean spirals and are fabricated in a free-standing gold/silicon nitride nanofilm by employing focused ion beam (FIB) lithography. The deformable spirals are instantly transformed from two dimensional (2D) to three-dimensional (3D) by the FIB-based nano-kirigami process. The 2D–to–3D transformation induces a dramatic irreversible change of the plasmonic quadruple modes and results in significant modulation in reflection by 137%. The suspended porous nano-kirigami metasurface is further integrated with an optofluidics device, with which the optical resonance is reversibly modulated by the pneumatic pressure. This work provides a strategy for tunable/reconfigurable metasurfaces, which are useful to build a promising lab-on-a-chip platform for microfluidics, biological diagnostics, chemical sensing, and pressure monitoring.

Shanshan Chen, Wei Wei, Zhiguang Liu, Xing Liu, Shuai Feng, Honglian Guo, Jiafang Li. Reconfigurable nano-kirigami metasurfaces by pneumatic pressure[J]. Photonics Research, 2020, 8(7): 07001177.

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