为实现激光在二维平面内高效、均匀烧蚀污渍、清洗靶材,更改激光逐行烧蚀扫描模式,设计了一种激光螺旋式填充路径,控制振镜电机偏转激光使其在平面内的烧蚀呈网状分布。结果表明:对于清洗区域内的任一点,相比于逐行烧蚀,螺旋烧蚀过程中该点区域获得冷却时间,激光热积累效应变弱。逐行扫描速度为单个振镜电机速度,螺旋扫描速度为两电机速度的矢量和。因此,相比于逐行扫描方式,激光螺旋式清洗的效果更加均匀,效率更高。

To enable efficient and uniform ablation of stains and cleaning of targets using laser in the two-dimensional plane, a laser spiral filling path is designed by changing the laser progressive scanning mode in this study. By controlling the galvanometer motor, the laser is deflected to distribute the ablation in a network shape over the plane. At any ablation point in the laser filling field, compared with the line-by-line ablation, the results confirmed a longer cooling time and a weaker laser thermal accumulation during spiral ablation. The line-by-line scanning speed is the motor speed of a single galvanometer, whereas the spiral scanning speed is the vector speed of two motors. Therefore, the effect of laser spiral cleaning is more uniform and effective as compared with the cleaning in the line-by-line scanning mode.