激光与光电子学进展, 2024, 61 (19): 1900001, 网络出版: 2024-04-03  

中国光学十大进展:三维无机微纳结构的激光加工与应用(特邀)

China's Top 10 Optical Breakthroughs: Laser Fabrication and Applications of 3D Inorganic Micro and Nanostructures (Invited)
作者单位
1 中国科学院理化技术研究所有机纳米光子学实验室,北京 100190
2 中国科学院大学,北京 100049
摘要
三维(3D)无机微纳结构在光子学、量子信息、航空航天、能源等领域发挥着重要作用。利用传统制备方法获得的无机微结构通常分辨率较低和形貌不可控。因此,3D无机微纳结构的精确可控制备成为亟待解决的难题。激光加工具有高精度、形貌可控等优势,能够实现真3D、高分辨、多尺度复杂3D微纳结构的制备,解决3D无机微纳结构的精确可控制备难题。本文综述了激光加工制备无机微纳结构的研究进展,首先讨论了连续激光和超快脉冲激光加工方式,重点针对飞秒激光加工技术,阐述了基于纯无机材料体系、有机-无机杂化体系,以及聚合物模板法等制备3D无机微纳结构的方法。随后,总结了近年来激光加工3D无机微纳结构在光学器件、量子芯片、信息存储与防伪、航空航天以及仿生结构等领域的应用。最后,展望了激光加工3D无机微纳结构的未来发展趋势。
Abstract
Three-dimensional (3D) inorganic micro and nanostructures play an important role in photonics, quantum information, aerospace, energy, and other fields. Inorganic microstructures prepared using traditional methods usually exhibit low resolution and uncontrollable morphology. The precise and controllable fabrication of 3D inorganic micro and nanostructures is a critical problem. Because of advantages such as 3D fabrication capability, high precision, and controllable morphology, laser fabrication can realize the preparation of 3D, high-resolution, and multiscale micro and nanostructures; furthermore, it can address the problem of accurate and controllable preparation of these 3D structures. In this study, the research progress of laser fabrication of inorganic micro and nanostructures was reviewed. First, continuous wave and ultrafast pulse laser fabrication methods were discussed, and especially, the femtosecond laser fabrication of 3D inorganic microstructures and nanostructures, including pure inorganic material systems, organic-inorganic hybrid systems, and polymer templates, were summarized. Further, the applications of 3D micro and nanostructures in optical devices, quantum chips, information storage, aerospace, and bionic structures in recent years were summarized. Finally, we highlighted the potential future development of the laser fabrication of 3D inorganic micro and nanostructures.

章剑苗, 金峰, 董贤子, 郑美玲. 中国光学十大进展:三维无机微纳结构的激光加工与应用(特邀)[J]. 激光与光电子学进展, 2024, 61(19): 1900001. Jianmiao Zhang, Feng Jin, Xianzi Dong, Meiling Zheng. China's Top 10 Optical Breakthroughs: Laser Fabrication and Applications of 3D Inorganic Micro and Nanostructures (Invited)[J]. Laser & Optoelectronics Progress, 2024, 61(19): 1900001.

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