设计出相位型正交散焦光栅,实现了一种新的光束质量M2因子实时测量技术。将散焦光栅和短焦透镜密接使用,透镜提供主要的聚焦能力,散焦光栅产生9个光轴,且在每个光轴上对焦距进行微调,使之具有不同的等效焦距,这样利用单一的CCD就可以在透镜焦平面上同时测量待测光束9个不同位置处的光强分布图样。利用二阶矩的方法计算束宽,经双曲线拟合得到光束的M2因子。对He-Ne激光器的输出光束进行了测量,得到其光束质量因子M2=5.775,与传统测量方法得到的结果相比,误差为5.1%。

Crossed phase defocus gratings are designed and a new technique for real-time measurement of beam quality factor M2 is achieved. We can get the beam spots at 9 various positions to be measured simultaneously by using the defocus gratings closely connecting with a short-focal-length lens. The lens provides the majority of the focusing power and the grating provides 9 separate optical axes and effectively modifies the focal length of each axis. The value of M2 is determined by calculating the beam diameters using the second moment method and curve-fitting. A He-Ne laser beam is measured by using the gratings designed and a M2 value of 5.775 is achieved. Compared with a conventional measurement, the error is 5.1%.