建立了应用导管X光透镜的掠出射微区X射线荧光分析系统,并将该系统应用于纳米薄膜的分析。为了提高入射X射线的强度并提高系统的空间分辨率,选用焦斑为41.7 μm的会聚透镜对原级X射线进行会聚,并在探测器前加上50 μm的狭缝以提高掠出射角扫描的角度分辨率。为了提高工作效率,编写了该系统的自动控制软件,实现了样品的自动扫描。利用该系统对采用金属蒸汽真空电弧(MEVVA)源离子束和薄膜沉积技术制备的纳米薄膜进行了掠入射X射线荧光和二维扫描分析。实验结果表明:该系统能有效地分析纳米厚度的薄膜,通过对薄膜进行掠出射角扫描分析和表面的二维扫描分析,得到了薄膜的厚度,密度及均匀性等信息。微区分析的空间分辨率可达到41.7 μm,实际空间分辨率为扫描步长50 μm。系统可用于分析薄膜样品,且荧光强度高,所需时间短,获得的信息全面丰富,数据可靠。

A Grazing Exit Micro X-ray Fluorescence (GE-MXRF) system involved with a polycapillary X-ray lens was established to analyze nanometer films. A polycapillary X-ray lens with spot size of 41.7 μm was applied to focus original X-ray and a slit of 50 μm was located in front of the detector to improve angle resolusion. In order to improve the working efficiency,a computer program was compiled to realize automatic control. With this system, a series of titanium and ferric layers deposited on GaAs single crystal by Metal Vapor Vacuum Arc(MEVVA) ion sources were measured. The results indicate that this system can analyze film samples effectively,and through grazing exit angle scan and surface two-dimensional scan, the density, thickness and the uniformity of film can be acquired. The spatial resolution of micro-analysis and the real spatial resolution of experiment are 41.7 μm and 50 μm,respectively. The conclusion is that this grazing GE-XRF system can realize the analysis of film sample automatically and quickly, also can acquire the overall information of sample and process these data effectivelly.