半导体光电, 2013, 34 (2): 298, 网络出版: 2013-05-24   

TDI CCD宽波段光谱响应度的高精度检测

High-Precision Detection of Wide-Band Spectral Responsivity of TDI CCD
作者单位
1 长春理工大学 电子信息工程学院, 长春 130022
2 中国科学院长春光学精密机械与物理研究所, 长春 130033
摘要
为了解决 TDI CCD光谱响应度检测精度较低、检测方法不够准确等问题, 提出了一套更为科学而准确的高精度 TDI CCD 光谱响应度检测方法。首先, 改进了TDI CCD视频信号处理方法; 其次, 选用不同窄带波长的LED阵列作为光源, 建立一种方便而准确的宽波段光谱响应度检测系统; 然后, 改变TDI CCD接收的辐射照度并检测TDI CCD输出信号, 提出一种高精度TDI CCD光谱响应度检测方法; 最后, 计算所有窄带波长的LED对应的TDI CCD光谱响应度, 绘制TDI CCD在400~900nm波长范围内的光谱响应度曲线。实验结果表明: 此方法覆盖了400~900nm的宽波长范围, 检测方便准确, 同时, 光谱响应度检测误差达0.025。
Abstract
To solve the problems as low detection precision and lack of efficient detection methods, a more scientific and accurate method for the spectral responsivity detection of TDI CCD was put forward. Firstly, the video signal processing technique was improved; Secondly, LED array with different narrow-band wavelengths were chosen as the light source to establish a convenient and accurate detection system for the wide-band spectral responsivity; Then, by changing the irradiance that TDI CCD takes over and detecting the output signal, a kind of high-precision detection method was puts forward; Finally, by calculating the corresponding spectral responsivity of TDI CCD for LED of all narrow-band wavelengths, it is drawn the spectral responsivity curve of TDI CCD in the wavelength scope from 400nm to 900nm. Experiment results show this method realizes higher precision over the wide wavelength scope of 400~900nm, and the detection error of spectral responsivity is 0.025.

刘妍妍, 李国宁, 杨晓慧, 刘云荣. TDI CCD宽波段光谱响应度的高精度检测[J]. 半导体光电, 2013, 34(2): 298. LIU Yanyan, LI Guoning, YANG Xiaohui, LIU Yunrong. High-Precision Detection of Wide-Band Spectral Responsivity of TDI CCD[J]. Semiconductor Optoelectronics, 2013, 34(2): 298.

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