中国激光, 2013, 40 (s1): s103002, 网络出版: 2013-11-05
脉冲激光辐照CCD探测器的热损伤机理
Thermal Damage Mechanism on CCD Detector Irradiated by Pulsed Laser
激光技术 激光损伤 脉冲激光 CCD成像器件 破坏机理 扫描电子显微镜 显微拉曼光谱仪 laser technique laser damage pulsed laser CCD imaging device damage mechanisms scanning electron microscope micro-Raman spectrometer
摘要
采用扫描电子显微镜和显微拉曼光谱仪研究了受脉冲激光损伤的CCD的形貌和光谱特性。在损伤表面上得到CCD各层的形貌,比较出不同层受激光损伤的先后次序,观察到感光区附近遮光层和多晶硅电极的破坏,研究深入到单个像素尺度;在截面上测得损伤区内部硅材料拉曼光谱特征峰红移,判定内部硅材料发生熔融,并造成表面多晶硅电极和基底短路,解释了CCD受皮秒激光热损伤完全失效的机理。
Abstract
The morpha and spectral character of damaged CCD, which has been irradiated by picosecond pulsed laser, are studied by using scanning electron microscope and micro-Raman spectrometer. Morphological damaged images of different layers are observed on the surface of CCD. The damage sequence is decided by comparing different layers′ conditions with a scale as small as a single pixel. The damage status of W-shield and poly-Si around one pixel is observed. On the cross section, the red-shift of Raman spectrum of bulk silicon material is measured and it means that bulk silicon melts, which brings a short-circuit between surface poly-Si electrode and substrate. The short-circuit explains the thermal mechanism of complete failure.
高刘正, 邵铮铮, 朱志武, 黄任, 常胜利. 脉冲激光辐照CCD探测器的热损伤机理[J]. 中国激光, 2013, 40(s1): s103002. Gao Liuzheng, Shao Zhengzheng, Zhu Zhiwu, Huang Ren, Chang Shengli. Thermal Damage Mechanism on CCD Detector Irradiated by Pulsed Laser[J]. Chinese Journal of Lasers, 2013, 40(s1): s103002.