为实现惯性约束聚变靶用空心玻璃微球直径、壁厚的可控,采用等离子体辉光放电聚合技术,以四甲基硅烷为掺杂气源,对化学气相沉积-氧化烧结法制备空心玻璃微球(HGM)这一制备方法进行了探索.实验结果表明:制备直径为400~600 μm、壁厚为5~15 μm的HGM,原子分数为5%是一个较合适的掺硅量,成功将微球直径和壁厚的收缩量控制在38%左右;玻璃化后样品中C含量明显降低,主要以C—Si键合形式存在,而Si含量相对增加,主要以Si—O键合形式存在;预充1.23×106 Pa氘气的微球,96 h后球内剩余气压依然高达72.95%.

A preparation method of hollow glass microsphere (HGM) is investigated,which adopts glow discharge polymerization technology and uses tetramethyl silane (TMS) as the dopant gas,in order to control the diameter and thickness of hollow glass microspheres for inertial confinement fusion targets.The results show that 5% silicon in Si-GDP shells is a compromised concentration for fabricating HGM whose diameter is 400-600 μm and thickness is 5-15 μm.We can successfully control the shrinkage of the diameter and wall thickness at about 38%.The carbon concentration of the samples decreases significantly and it mainly exists in the form of C—Si bonding,while the silicon concentration increases significantly and it mainly exists in the form of Si—O bonding after the sintering step.The residual pressure reaches 72.95% in the shells which filled 1.23 MPa deuterium after 96 h.