能量色散X射线荧光分析方法是目前常用的一种多元素分析方法,但该方法检出限和分析精度,受到分析基体的影响.基本参数法是目前一种常用的分析方法,但在使用过程必须获取净峰面积和基体所有成分,而在实际使用时,尤其在分析低含量样品时,净峰面积计算、基体中“暗物质”影响了测量精度,制约了基本参数法的应用.针对基本参数法的不足,将谱线解析方法与基本参数法融合,将重叠峰剥离过程嵌入基本参数法迭代过程中.在含量计算过程中,采用分析样品特征X射线分支比的理论系数,对重叠峰进行剥离,解决能量色散X射线荧光测量中净峰面积计算和定量分析问题;在计算过程中,对“暗物质”进行均一化处理.通过对标准物质测量分析,结果表明对于Ni,Cu,Zn三个元素改进型基本参数法(改进型FP)测量结果准确度高于影响系数法。

The X-ray Fluorescence Analysis(XRFA) is an important and efficient method on the element anylsis and is used in geology,industry and environment protection.But XRFA has a backdraw that the determination limit and accuracy are effected by the matrix of the sample.Now the fundamental parameter is usually used to calculate the content of elements in XRFA,and it is an efficient method if the matrix and net area of characteristic X-ray peak are obtained.But this is invalide in in-stu XRFA.Also the method of net area and the “black material” of sample are the key point of the fundamental parameter method when the Energy Dispersive X-ray Fluorescence Analysis(EDXRFA) method is used in the low content sample.In this paper a advanced fundamental parameter method is discussed.The advanced fundamental parameter method includes the spectra analysis and the fundamental parameter method,which inserts the overlapping peaks separation method into the iteration process of the fundamental parameter method.The advanced method can resolve the net area and the quantitative analysis.The advanced method is used to analyse the standard sample.Compare to the content obtained from the coefficient method,the precision of Cu,Ni and Zn is better than coeffieciency method.The result shows that the advanced method could improve the precision of the EDXRFA,so the advanced method is better than the coefficient method.