采用微硅-锆钛酸铅（Si-PZT）悬臂梁结构并在悬臂梁末端附加镍质量块, 构成可以工作于低频环境（小于1 000 Hz）的微压电能量采集器, 一种利用压电效应将环境振动能转换为电能的器件。利用金薄膜作为中间层的共晶键合技术和PZT研磨减薄技术制备了微压电悬臂梁结构, PZT减薄实验最好结果为减薄至8 μm。镍质量块（2 mm×2 mm×0.6 mm）采用微电铸工艺制备。通过对硅片与块材PZT的共晶键合工艺与PZT减薄技术的研究, 制备出总厚度约为71 μm的Si-PZT悬臂梁结构, 其中硅梁厚约为47 μm, PZT梁厚约为24 μm。制备的微压电振动能量采集器样品的测试结果表明: 在谐振频率为950 Hz, 1.0g加速度激励条件下, 其交流输出峰值电压可达958 mV。

This paper presents an energy harvester which operates at less than 1 kHz and consists of a micro silicon-lead zirconate titanate (Si-PZT) cantilever and a nickel mass block on the cantilever. The energy harvester is a device that can convert the ambient mechanical vibration into electrical energy employing the piezoelectric effect. The micro piezo cantilever structure was fabricated by eutectic bonding using gold thin film as a bonding layer. A PZT mechanical polishing process was used to thin the bulk PZT. The thinnest PZT film obtained was 8 μm. A nickel mass block (2 mm×2 mm×0.6 mm) was fabricated using micro electroforming process. By optimizing the bonding and polishing processes, the thickness of fabricated Si-PZT cantilever was about 71 μm, and the thicknesses of the silicon beam and the PZT beam were about 47 μm and 24 μm, respectively. The results showed that the AC output voltage of the micro energy harvester was around 958 mV at the resonant frequency of 950 Hz and the acceleration of 1.0g.