为了改善现有CO2激光器工频LC谐振充电时充电电压随激光器工作频率升高而降低、影响激光输出的稳定性和光束质量，不利于装置的小型化和轻量化的问题。采用全桥逆变结构和串联谐振软开关电路，研究了36kV/10kW高频高压充电电源。该电源系统采用三相380V 交流电作为供电系统，大功率智能功率模块作为全桥逆变电路。逆变交流信号经串联谐振电路及高频脉冲变压器得到高压脉冲信号，高压脉冲经整流给负载电容充电，电源应用电压电流双闭环控制系统，输出电压、电流经采样及放大后，反馈到电源控制芯片SG3525，芯片SG3525通过判断反馈信号的大小，控制输出脉冲宽度调制驱动信号的占空比。激光器放电频率为25Hz时，电源输出电压为37kV，峰值输出功率为13.05kW，充电效率为0.826。结果表明，该高频高压充电电源适合用作CO2激光器的高压充电电源。

The output voltage of a traditional high voltage charging power supply of CO2 laser in LC resonant charging configuration drops with the increase of operating frequency, which affect the stability of laser output and the beam quality. Meanwhile, traditional high voltage charging power supply has huge size and weight which is disadvantageous to small size and weight of the device. In order to resolve the problems, a 36kV/10kW high frequency and high voltage charging power supply was studied by using a full bridge inverter circuit and a series resonant soft switch circuit. Three phase 380V alternating current (AC) was used as the energy system, high power intelligent power module(IPM) was used as full bridge inverter circuit. High voltage pulse signal was obtained by the inverter AC signal through series resonant circuit and high frequency pulse transformer. High voltage pulse charged power supply for load capacitor through rectifier. Voltage and current double closed-loop control system was used in the charging power. After sampling and amplification, the output voltage and current were fed back to the power supply control chip SG3525. SG3525 controlled the duty cycle of pulse width modulation driving signal by feedback signal. Experimental results show that the output voltage of the charging power supply is 37kV, output peak power is 13.05kW, and charging efficiency is 0.826 when laser discharge frequency is 25Hz. The high frequency and high voltage charging power supply is suit for high voltage charging power of CO2 laser.