单点金刚石车削技术已经广泛应用于高精度光学表面的制造，然而其残留在被加工表面的微纳织构将会影响部分光学系统的性能，需要光滑去除。文中对单点金刚石车削刀痕的抛光去除技术进行了研究，发现抛光方向与刀痕垂直时刀痕去除效率最高。基于此，提出了一种螺旋正弦抛光运动轨迹，介绍了螺旋正弦运动轨迹的设计原则，并应用气囊抛光的方式与螺旋式和光栅式运动轨迹进行了对比抛光实验，证明此运动轨迹下微纳织构的改善效果明显优于其他两种方式。最后应用螺旋正弦运动轨迹对一锗材料单点金刚石车削非球面进行了抛光光滑处理，在保持了面形精度的前提下，表面糙度Ra由1.28 nm降低到0.4 nm，规律性微纳刀痕变为随机织构，达到了表面织构改善的目的。

Single point diamond turing (SPDT) technology has been widely used in the high precision optical surface processing field. However, the micro-nano texture which is mainly composed of turning marks remain on the turned surface will affect performance of optical systems. Therefore, it’s necessary to remove the turning marks for improving the surface quality. Removal of the single point diamond turning marks was studied in the paper. It was found that the removal efficiency was highest when the polishing direction was perpendicular to the turning marks. A new polishing trace called spiral sine trace was presented based on the finding. The design principle was introduced in detail. Contrast experiment of different polishing tracks consisting of spiral sine trace, spiral trace and raster trace utilizing bonnet polishing was carried out. Result shows that the improvement effect of micro-nano texture in spiral sine trace was obviously superior to two other kinds of trace. A germanium aspherical surface manufactured by SPDT was smoothed by spiral sine bonnet polishing. The results shows that the roughness of surface Ra reduce from 1.28 nm to 0.4 nm before and after polishing, the regular turning marks transform to random micro-nano texture, and above all, the surface figure accuracy isn’t damaged during the smoothing process.